Shutdown teos2 SNF 2008-03-24 15:33:58: not controlling pressure

seymour at snf.stanford.edu seymour at snf.stanford.edu
Tue Mar 25 09:57:22 PDT 2008


ran teos2vh recipe and watched the pressure during deposition. It remained constant at 1197 (setpoint 1200) mT. The TEOS and Oxygen flows were stable at 60 and 300 sccm. Tube is up.




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