Comment teos2 SNF 2008-03-25 15:32:21: leak check silane line
seymour at snf.stanford.edu
seymour at snf.stanford.edu
Tue Mar 25 15:32:22 PDT 2008
replaced both injectors and flex lines, pumped tube and did a rate of rise. It was good at 7mT per min. Running LTO400 as a coat recipe after quartz change.
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