Comment teos2 SNF 2008-03-25 15:32:21: leak check silane line

seymour at snf.stanford.edu seymour at snf.stanford.edu
Tue Mar 25 15:32:22 PDT 2008


replaced both injectors and flex lines, pumped tube and did a rate of rise. It was good at 7mT per min. Running LTO400 as a coat recipe after quartz change.




More information about the teos2-pcs mailing list