Problem teos2 SNF 2008-03-26 11:08:11: pressure still low <400mtorr
cmcg at snf.stanford.edu
cmcg at snf.stanford.edu
Wed Mar 26 11:08:16 PDT 2008
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Comment teos2 SNF 2008-03-25 15:36:26: needs test after coat using TEOS2VH recipe
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Problem teos2 SNF 2008-03-26 11:08:11: pressure still low <400mtorr
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Comment teos2 SNF 2008-03-25 15:36:26: needs test after coat using TEOS2VH recipe
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Problem teos2 SNF 2008-03-26 11:08:11: pressure still low <400mtorr
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