March 2008 Archives by author

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Starting: Thu Mar 6 22:29:23 PST 2008
Ending: Wed Mar 26 20:20:33 PDT 2008
Messages: 30

• Comment teos2 SNF 2008-03-24 11:25:57: deposition pressure and rate   cmcg at snf.stanford.edu
• Problem teos2 SNF 2008-03-26 11:08:11: pressure still low <400mtorr   cmcg at snf.stanford.edu
• Comment teos2 SNF 2008-03-26 20:20:33: pressure good again 1200mtorr   cmcg at snf.stanford.edu
• Comment teos2 SNF 2008-03-19 11:12:53: running a test   maurice at snf.stanford.edu
• Comment teos2 SNF 2008-03-19 11:48:57: teos flow unstable   maurice at snf.stanford.edu
• Comment teos2 SNF 2008-03-19 11:12:53: running a test   maurice at snf.stanford.edu
• Shutdown teos2 SNF 2008-03-18 18:38:29: Not depositting   maurice at snf.stanford.edu
• Comment teos2 SNF 2008-03-24 10:16:30: Running pressure test   maurice at snf.stanford.edu
• Comment teos2 SNF 2008-03-24 11:05:15: Deposition pressure low   maurice at snf.stanford.edu
• Shutdown teos2 SNF 2008-03-07 07:04:34: Tube port   mdickey at snf.stanford.edu
• Shutdown teos2 SNF 2008-03-18 18:38:29: Not depositting   rik at snf.stanford.edu
• Comment teos2 SNF 2008-03-19 11:48:57: teos flow unstable   seymour at snf.stanford.edu
• Comment teos2 SNF 2008-03-21 11:51:30: changing the teos source starting about 13:30   seymour at snf.stanford.edu
• Shutdown teos2 SNF 2008-03-24 15:33:58: not controlling pressure   seymour at snf.stanford.edu
• Shutdown teos2 SNF 2008-03-24 15:33:58: not controlling pressure   seymour at snf.stanford.edu
• Problem teos2 SNF 2008-03-24 06:30:32: Low Deposition Pressure   seymour at snf.stanford.edu
• Comment teos2 SNF 2008-03-21 09:38:12: Low Pressure during Deposition   seymour at snf.stanford.edu
• Comment teos2 SNF 2008-03-21 11:51:30: changing the teos source starting about 13:30   seymour at snf.stanford.edu
• Comment teos2 SNF 2008-03-24 10:16:30: Running pressure test   seymour at snf.stanford.edu
• Comment teos2 SNF 2008-03-24 11:05:15: Deposition pressure low   seymour at snf.stanford.edu
• Comment teos2 SNF 2008-03-24 11:25:57: deposition pressure and rate   seymour at snf.stanford.edu
• Comment teos2 SNF 2008-03-25 15:32:21: leak check silane line   seymour at snf.stanford.edu
• Comment teos2 SNF 2008-03-25 15:33:18: above comments meant for BPSG   seymour at snf.stanford.edu
• Comment teos2 SNF 2008-03-25 15:36:26: needs test after coat using TEOS2VH recipe   seymour at snf.stanford.edu
• Problem teos2 SNF 2008-03-26 11:08:11: pressure still low <400mtorr   seymour at snf.stanford.edu
• Problem teos2 SNF 2008-03-06 22:29:23: pump program failed to run   tberg at snf.stanford.edu
• Shutdown teos2 SNF 2008-03-07 07:04:34: Tube port   tberg at snf.stanford.edu
• Problem teos2 SNF 2008-03-06 22:29:23: pump program failed to run   ywidjaja at snf.stanford.edu
• Comment teos2 SNF 2008-03-21 09:38:12: Low Pressure during Deposition   ywidjaja at snf.stanford.edu
• Problem teos2 SNF 2008-03-24 06:30:32: Low Deposition Pressure   ywidjaja at snf.stanford.edu

Last message date: Wed Mar 26 20:20:33 PDT 2008
Archived on: Sun Dec 23 09:24:59 PST 2012

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