From sanjah at snf.stanford.edu Wed May 14 22:16:36 2008 From: sanjah at snf.stanford.edu (sanjah at snf.stanford.edu) Date: Wed, 14 May 2008 22:16:36 -0700 Subject: Problem teos2 SNF 2008-05-14 22:16:35: tube doesn't boat out - my wafers are still inside Message-ID: From seymour at snf.stanford.edu Thu May 15 10:20:44 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 15 May 2008 10:20:44 -0700 Subject: Shutdown teos2 SNF 2008-05-15 10:20:43: tube not opening at cycle end Message-ID: Gate valve or slow pump valve leaking keeping tube under vacuum during vent, not allowing tube to open. From seymour at snf.stanford.edu Fri May 16 08:53:57 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 16 May 2008 08:53:57 -0700 Subject: Shutdown teos2 SNF 2008-05-15 10:20:43: tube not opening at cycle end Message-ID: vented tube with recipe N2 flow for 21 mins and door opened. I checked and cleaned the throttle valve and made sure it went full open and closed. Put the tube in pump recipe. From tberg at snf.stanford.edu Mon May 19 10:36:34 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 19 May 2008 10:36:34 -0700 Subject: Problem teos2 SNF 2008-05-14 22:16:35: tube doesn't boat out - my wafers are still inside Message-ID: Checked backfill, it takes just over 20 minutes. Recipe allows 30 min looks OK From cmcg at snf.stanford.edu Mon May 19 19:17:27 2008 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Mon, 19 May 2008 19:17:27 -0700 Subject: Comment teos2 SNF 2008-05-19 19:17:26: skips boat in step 10 Message-ID: for some reason the program teos2vh2 skips directly from step 5 to step 15, and the tube does not automatically close. I manually closed the tube and continued the run. From cmcg at snf.stanford.edu Mon May 19 22:41:25 2008 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Mon, 19 May 2008 22:41:25 -0700 Subject: Comment teos2 SNF 2008-05-19 22:41:24: step 125 boat out skipped Message-ID: The automatic boat out (step 125) was skipped as well. When going to do it manually the system was not vented yet....suggesting step 120, slow backfill was also skipped From seymour at snf.stanford.edu Tue May 20 13:32:56 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 20 May 2008 13:32:56 -0700 Subject: Shutdown teos2 SNF 2008-05-20 13:32:55: door interlock on with door open Message-ID: From seymour at snf.stanford.edu Wed May 21 11:53:18 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 21 May 2008 11:53:18 -0700 Subject: Shutdown teos2 SNF 2008-05-20 13:32:55: door interlock on with door open Message-ID: door interlock sensor faulty and was replaced. Gatevalve was taken apart and cleaned and reassembled. system checked out for proper operation. From seymour at snf.stanford.edu Wed May 21 11:54:46 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 21 May 2008 11:54:46 -0700 Subject: Comment teos2 SNF 2008-05-19 19:17:26: skips boat in step 10 Message-ID: door closed interlock sensor was faulty and was replaced From seymour at snf.stanford.edu Wed May 21 12:00:15 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 21 May 2008 12:00:15 -0700 Subject: Comment teos2 SNF 2008-05-19 22:41:24: step 125 boat out skipped Message-ID: cleaned and replaced orings for gate valve. From cmcg at snf.stanford.edu Tue May 27 19:56:21 2008 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Tue, 27 May 2008 19:56:21 -0700 Subject: Shutdown teos2 SNF 2008-05-27 19:56:21: power failure Message-ID: Power to Tylan Tubes 5-8 died suddenly at 7:55pm. I have wafers inside, please do not run before I can retrieve them. From cmcg at snf.stanford.edu Tue May 27 20:32:14 2008 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Tue, 27 May 2008 20:32:14 -0700 Subject: Comment teos2 SNF 2008-05-27 20:32:13: wafers retrieved, dummies need to be replaced Message-ID: I manually retrieved my wafers. The dummies are flaking and need to be replaced From tberg at snf.stanford.edu Wed May 28 09:14:36 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 28 May 2008 09:14:36 -0700 Subject: Shutdown teos2 SNF 2008-05-27 19:56:21: power failure Message-ID: turned on bank power, loaded recipe, turned on element breaker at temp From maurice at snf.stanford.edu Wed May 28 11:44:41 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 28 May 2008 11:44:41 -0700 Subject: Comment teos2 SNF 2008-05-27 20:32:13: wafers retrieved, dummies need to be replaced Message-ID: Replaced dummies with new diffusion cleaned wafers From cmcg at snf.stanford.edu Wed May 28 15:12:06 2008 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Wed, 28 May 2008 15:12:06 -0700 Subject: Problem teos2 SNF 2008-05-28 15:12:06: pressure low, dep rate high.... Message-ID: The deposition pressure was 820mTorr, rather than 1200. The deposition rate for the last run was abnormally high, 55A/min, as oppposed to the nominal 40A/min, most likely due to the difference in pressure. From tberg at snf.stanford.edu Thu May 29 06:47:58 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 29 May 2008 06:47:58 -0700 Subject: Comment teos2 SNF 2008-05-29 06:47:57: Checked pressure control and it was working correctly Message-ID: Will keep on yellow for observationm From cmcg at snf.stanford.edu Fri May 30 19:54:00 2008 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Fri, 30 May 2008 19:54:00 -0700 Subject: Comment teos2 SNF 2008-05-30 19:53:59: dep rate normal again, 35A/min Message-ID: The dep rate appears to be back to the nominal value, 35A/min. I do not understand why the dep rate stays at a fairly consistent value of 35-40A/min for a number of runs, and then suddenly jumps or drops for a given run. Is there anything we can monitor during future runs to try and diagnose this inconsistency?