Problem teos2 SNF 2008-05-28 15:12:06: pressure low, dep rate high....

cmcg at snf.stanford.edu cmcg at snf.stanford.edu
Wed May 28 15:12:06 PDT 2008


The deposition pressure was 820mTorr, rather than 1200.  The deposition rate for the last run was abnormally high, 55A/min, as oppposed to the nominal 40A/min, most likely due to the difference in pressure.




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