From cmcg at snf.stanford.edu Thu Sep 4 18:06:52 2008 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Thu, 4 Sep 2008 18:06:52 -0700 Subject: Comment teos2 SNF 2008-09-04 18:06:51: low dep rate Message-ID: typically 30-35A/min, last run averaged 25A/min. keep and eye on the next run. From jwpchen at snf.stanford.edu Fri Sep 5 18:20:44 2008 From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu) Date: Fri, 5 Sep 2008 18:20:44 -0700 Subject: Problem teos2 SNF 2008-09-05 18:20:42: cannot vent Message-ID: PUMP7 gives MFS alarm on N2LO upon reaching holding step. When ALMACK'ed to vent, seems to give zero N2BKFL. On the front panel, N2BKFL's valve turns on, but FC stays off, and reads 0 to 6 flow. Pressure remains at low vac, thus cannot open door. Ran PUMP7 a couple more times, same result. Left tube in holding step. From shott at stanford.edu Fri Sep 5 19:29:09 2008 From: shott at stanford.edu (John Shott) Date: Fri, 05 Sep 2008 19:29:09 -0700 Subject: Problem teos2 SNF 2008-09-05 18:20:42: cannot vent In-Reply-To: <20080906012045.140B22D6A84@smtp1.stanford.edu> References: <20080906012045.140B22D6A84@smtp1.stanford.edu> Message-ID: <48C1EAF5.3000306@stanford.edu> I suspect that this is due to the failed compressed air .... I think that a lot of the NUPRO valves on the Tylan furnaces are powered by compressed air and, as a result, do not likely respond at the moment. Sorry ... but at this point I have no further information as to the status of the compressed air. John From tberg at snf.stanford.edu Mon Sep 8 08:59:27 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 8 Sep 2008 08:59:27 -0700 Subject: Problem teos2 SNF 2008-09-05 18:20:42: cannot vent Message-ID: N2 is flowing fine . Must have been from Air loss. From jwpchen at snf.stanford.edu Tue Sep 9 00:54:41 2008 From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu) Date: Tue, 9 Sep 2008 00:54:41 -0700 Subject: Comment teos2 SNF 2008-09-09 00:54:41: dep rate Message-ID: I averaged 38 +/- 5A /min... but I did interleaved slots From jwpchen at snf.stanford.edu Tue Sep 9 00:59:07 2008 From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu) Date: Tue, 9 Sep 2008 00:59:07 -0700 Subject: Comment teos2 SNF 2008-09-09 00:59:06: teos level 15% Message-ID: level sensor on teos drum went 75->15% some time during my dep. sorry for only checking before and after dep... From tberg at snf.stanford.edu Tue Sep 9 06:10:46 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 9 Sep 2008 06:10:46 -0700 Subject: Shutdown teos2 SNF 2008-09-09 06:10:45: changing TEOS Message-ID: From tberg at snf.stanford.edu Tue Sep 9 08:50:57 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 9 Sep 2008 08:50:57 -0700 Subject: Comment teos2 SNF 2008-09-09 08:50:56: Replaced TEOS ampule heating Up Message-ID: From tberg at snf.stanford.edu Tue Sep 9 10:16:10 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 9 Sep 2008 10:16:10 -0700 Subject: Comment teos2 SNF 2008-09-09 00:59:06: teos level 15% Message-ID: Replaced TEOS ampule brought back up to temp, checked flow OK From tberg at snf.stanford.edu Tue Sep 9 10:16:23 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 9 Sep 2008 10:16:23 -0700 Subject: Comment teos2 SNF 2008-09-09 08:50:56: Replaced TEOS ampule heating Up Message-ID: Replaced TEOS ampule brought back up to temp, checked flow OK From tberg at snf.stanford.edu Tue Sep 9 10:16:34 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 9 Sep 2008 10:16:34 -0700 Subject: Shutdown teos2 SNF 2008-09-09 06:10:45: changing TEOS Message-ID: Replaced TEOS ampule brought back up to temp, checked flow OK From cmcg at snf.stanford.edu Mon Sep 22 15:45:57 2008 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Mon, 22 Sep 2008 15:45:57 -0700 Subject: Problem teos2 SNF 2008-09-22 15:45:55: MFS ALARM step 30, O2 problem Message-ID: MFS ALARM triggered on step 30. O2 reported to be at 750, as called for in the program, but dropped to zero when the alarm was acknowledged. It would then go through phases of going back to 750 and then 0, and the alarm would come on accordingly. The light next to the O2 tank on the screen was flashing, as was the light for the O2 valve and the below atm. From cmcg at snf.stanford.edu Wed Sep 24 11:20:01 2008 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Wed, 24 Sep 2008 11:20:01 -0700 Subject: Shutdown teos2 SNF 2008-09-24 11:20:00: O2 interlock problem! Message-ID: Still having problems with the O2 interlock. Alarm triggers, O2 flow reads 0, when alarm is acknowledged 02 flow goes up to set point of 750 for about 2 seconds before the interlock trips and, shuting off the O2 and triggering the alarm. From tberg at snf.stanford.edu Wed Sep 24 14:15:04 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 24 Sep 2008 14:15:04 -0700 Subject: Shutdown teos2 SNF 2008-09-24 11:20:00: O2 interlock problem! Message-ID: Unplugged tube port and throttle valve. Ran O2 at 300 and 500 no problem. It is in pump 7 now will leave yellow for observation From tberg at snf.stanford.edu Wed Sep 24 14:25:28 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 24 Sep 2008 14:25:28 -0700 Subject: Problem teos2 SNF 2008-09-22 15:45:55: MFS ALARM step 30, O2 problem Message-ID: Cleaned tube port and throttle valve. ran O2 no problem From tberg at snf.stanford.edu Wed Sep 24 14:25:49 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 24 Sep 2008 14:25:49 -0700 Subject: Problem teos2 SNF 2008-09-24 14:25:46: Observation after repair Message-ID: From cmcg at snf.stanford.edu Wed Sep 24 19:28:14 2008 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Wed, 24 Sep 2008 19:28:14 -0700 Subject: Shutdown teos2 SNF 2008-09-24 19:28:13: TEOS LEAK Message-ID: MFS ALARM --> TEOS LEAK O2 flow during step 30 ran fine, but TEOS LEAK alarm at step 70. From maurice at snf.stanford.edu Thu Sep 25 13:49:17 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 25 Sep 2008 13:49:17 -0700 Subject: Shutdown teos2 SNF 2008-09-24 19:28:13: TEOS LEAK Message-ID: CMCG ran a test and Teos2 flows are ok From maurice at snf.stanford.edu Thu Sep 25 16:55:07 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 25 Sep 2008 16:55:07 -0700 Subject: Comment teos2 SNF 2008-09-04 18:06:51: low dep rate Message-ID: archived From cmcg at snf.stanford.edu Thu Sep 25 19:27:06 2008 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Thu, 25 Sep 2008 19:27:06 -0700 Subject: Comment teos2 SNF 2008-09-25 19:27:06: tube running w/o MFS ALARM Message-ID: tube is up and running without errors. Dep rate for test run was 41A/min for a fresh batch of 4 wafers, close packed, run for 1hr. Next run of 7 real wafers with prior coating of oxide had dep rate of 27A/min, run close packed for 1.5hrs. From tberg at snf.stanford.edu Mon Sep 29 06:42:24 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 29 Sep 2008 06:42:24 -0700 Subject: Problem teos2 SNF 2008-09-24 14:25:46: Observation after repair Message-ID: OK now