Comment teos2 SNF 2008-09-25 19:27:06: tube running w/o MFS ALARM

cmcg at snf.stanford.edu cmcg at snf.stanford.edu
Thu Sep 25 19:27:06 PDT 2008


tube is up and running without errors.  Dep rate for test run was 41A/min for a fresh batch of 4 wafers, close packed,  run for 1hr.  Next run of 7 real wafers with prior coating of oxide had dep rate of 27A/min, run close packed for 1.5hrs.




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