From cmcg at snf.stanford.edu Tue Aug 4 20:47:59 2009 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Tue, 4 Aug 2009 20:47:59 -0700 Subject: Problem teos2 SNF 2009-08-04 20:47:58: TEOS flow fluctuates Message-ID: TEOS flow fluctuating wildly. Drops out periodically. From cmcg at snf.stanford.edu Wed Aug 5 18:36:23 2009 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Wed, 5 Aug 2009 18:36:23 -0700 Subject: Problem teos2 SNF 2009-08-05 18:36:23: MFS Alarm Message-ID: TEOS flow hit 130sccm after wild fluctuations during the dep (set for 60) Pressure slowly increased through run, going from nominal 1200 up to 1500mTorr at one point One of these two issues triggered a MFS Alarm. From cmcg at snf.stanford.edu Wed Aug 5 18:40:26 2009 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Wed, 5 Aug 2009 18:40:26 -0700 Subject: Shutdown teos2 SNF 2009-08-05 18:40:25: TEOS leak Message-ID: TEOS interlock, then TEOS leak error on display in back..... From seymour at snf.stanford.edu Thu Aug 6 14:09:54 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 6 Aug 2009 14:09:54 -0700 Subject: Shutdown teos2 SNF 2009-08-05 18:40:25: TEOS leak Message-ID: replaced TEOS MFC. checked flow. From seymour at snf.stanford.edu Thu Aug 6 14:10:58 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 6 Aug 2009 14:10:58 -0700 Subject: Problem teos2 SNF 2009-08-04 20:47:58: TEOS flow fluctuates Message-ID: replaced TEOS MFC From seymour at snf.stanford.edu Thu Aug 6 14:11:31 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 6 Aug 2009 14:11:31 -0700 Subject: Problem teos2 SNF 2009-08-05 18:36:23: MFS Alarm Message-ID: replaced TEOS MFC From seymour at snf.stanford.edu Thu Aug 6 14:11:58 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 6 Aug 2009 14:11:58 -0700 Subject: Problem teos2 SNF 2009-08-06 14:11:58: needs test after repair Message-ID: From maurice at snf.stanford.edu Thu Aug 6 16:00:39 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 6 Aug 2009 16:00:39 -0700 Subject: Comment teos2 SNF 2009-08-06 16:00:38: running test Message-ID: Ray replaced Teos MFC From maurice at snf.stanford.edu Thu Aug 6 18:12:25 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 6 Aug 2009 18:12:25 -0700 Subject: Problem teos2 SNF 2009-08-06 18:12:25: Teos flow unstable Message-ID: Flow started at the set point of 60sccm for the first 20 minutes then started fluctuating from 0 to 300 From maurice at snf.stanford.edu Mon Aug 10 15:58:30 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 10 Aug 2009 15:58:30 -0700 Subject: Comment teos2 SNF 2009-08-10 15:58:29: Running test Message-ID: Teos2std 02:00:00 From tberg at snf.stanford.edu Tue Aug 11 06:23:31 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 11 Aug 2009 06:23:31 -0700 Subject: Shutdown teos2 SNF 2009-08-11 06:23:30: no teos flow Message-ID: From tberg at snf.stanford.edu Tue Aug 11 12:40:54 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 11 Aug 2009 12:40:54 -0700 Subject: Comment teos2 SNF 2009-08-11 12:40:53: Replaced MFC Message-ID: Replaced MFC still has high leak rate -purging From seymour at snf.stanford.edu Tue Aug 18 09:39:49 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 18 Aug 2009 09:39:49 -0700 Subject: Comment teos2 SNF 2009-08-18 09:39:49: TEOS tube sent out for repair Message-ID: From seymour at snf.stanford.edu Thu Aug 20 08:43:25 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 20 Aug 2009 08:43:25 -0700 Subject: Shutdown teos2 SNF 2009-08-11 06:23:30: no teos flow Message-ID: teos flow stable. tube was pulled and cleaned. TEOS MFC changed. I ran the tube for 50 mins and the flow was stable. Tube needs testing after repair. From seymour at snf.stanford.edu Thu Aug 20 08:43:47 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 20 Aug 2009 08:43:47 -0700 Subject: Problem teos2 SNF 2009-08-06 18:12:25: Teos flow unstable Message-ID: flow stable at this tiime From seymour at snf.stanford.edu Thu Aug 20 08:44:25 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 20 Aug 2009 08:44:25 -0700 Subject: Problem teos2 SNF 2009-08-06 14:11:58: needs test after repair Message-ID: all is good at this time From seymour at snf.stanford.edu Thu Aug 20 08:44:36 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 20 Aug 2009 08:44:36 -0700 Subject: Problem teos2 SNF 2009-07-01 15:30:45: 60% lower dep rate Message-ID: noted From seymour at snf.stanford.edu Thu Aug 20 08:44:46 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 20 Aug 2009 08:44:46 -0700 Subject: Comment teos2 SNF 2009-07-02 14:23:09: dep rate slightly high Message-ID: noted From seymour at snf.stanford.edu Thu Aug 20 08:44:56 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 20 Aug 2009 08:44:56 -0700 Subject: Comment teos2 SNF 2009-08-06 16:00:38: running test Message-ID: noted From seymour at snf.stanford.edu Thu Aug 20 08:45:06 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 20 Aug 2009 08:45:06 -0700 Subject: Comment teos2 SNF 2009-08-10 15:58:29: Running test Message-ID: noted From seymour at snf.stanford.edu Thu Aug 20 08:45:29 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 20 Aug 2009 08:45:29 -0700 Subject: Problem teos2 SNF 2009-08-20 08:45:28: needs test after repair Message-ID: From cmcg at snf.stanford.edu Thu Aug 20 23:52:48 2009 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Thu, 20 Aug 2009 23:52:48 -0700 Subject: Comment teos2 SNF 2009-08-20 23:52:47: TUBE IS BACK AND RUNNING LIKE A CHARM! Message-ID: Nice work! Thanks for making the repairs. TEOS flow is very stable, dep rate (30.6A/min) looks good. From cmcg at snf.stanford.edu Fri Aug 21 18:43:13 2009 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Fri, 21 Aug 2009 18:43:13 -0700 Subject: Problem teos2 SNF 2009-08-21 18:43:13: won't pump down Message-ID: repeatedly fails leak check during pumpdown for pump7. Will leave as is over weekend... From yoonjin at snf.stanford.edu Sun Aug 23 00:23:43 2009 From: yoonjin at snf.stanford.edu (yoonjin at snf.stanford.edu) Date: Sun, 23 Aug 2009 00:23:43 -0700 Subject: Problem teos2 SNF 2009-08-23 00:23:43: leakage check failed Message-ID: - From pponce at snf.stanford.edu Sun Aug 23 23:24:12 2009 From: pponce at snf.stanford.edu (pponce at snf.stanford.edu) Date: Sun, 23 Aug 2009 23:24:12 -0700 Subject: Problem teos2 SNF 2009-08-23 23:24:11: TEOS level at 15 Message-ID: very low From tberg at snf.stanford.edu Mon Aug 24 06:11:17 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 24 Aug 2009 06:11:17 -0700 Subject: Shutdown teos2 SNF 2009-08-24 06:11:16: teos mt Message-ID: From seymour at snf.stanford.edu Mon Aug 24 10:12:21 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 24 Aug 2009 10:12:21 -0700 Subject: Problem teos2 SNF 2009-08-23 23:24:11: TEOS level at 15 Message-ID: teos container replaced From seymour at snf.stanford.edu Mon Aug 24 10:12:51 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 24 Aug 2009 10:12:51 -0700 Subject: Problem teos2 SNF 2009-08-23 00:23:43: leakage check failed Message-ID: when checked in the morning it was fine From seymour at snf.stanford.edu Mon Aug 24 10:13:31 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 24 Aug 2009 10:13:31 -0700 Subject: Problem teos2 SNF 2009-08-21 18:43:13: won't pump down Message-ID: was pumping ok this morning From seymour at snf.stanford.edu Mon Aug 24 10:42:23 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 24 Aug 2009 10:42:23 -0700 Subject: Shutdown teos2 SNF 2009-08-24 06:11:16: teos mt Message-ID: TEOS container changed. Good base and leak rate TEOS flow ok. With 500 SCCM N2 the process pressure is 361 mT From seymour at snf.stanford.edu Mon Aug 24 10:43:45 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 24 Aug 2009 10:43:45 -0700 Subject: Problem teos2 SNF 2009-08-24 10:43:44: needs test after TEOS replaced Message-ID: From maurice at snf.stanford.edu Tue Aug 25 13:36:27 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 25 Aug 2009 13:36:27 -0700 Subject: Problem teos2 SNF 2009-08-24 10:43:44: needs test after TEOS replaced Message-ID: pponce ran the standard recipe for ~32 min and got ~.15 um. looks good From maurice at snf.stanford.edu Tue Aug 25 13:36:47 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 25 Aug 2009 13:36:47 -0700 Subject: Problem teos2 SNF 2009-08-20 08:45:28: needs test after repair Message-ID: test good From maurice at snf.stanford.edu Tue Aug 25 13:38:01 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 25 Aug 2009 13:38:01 -0700 Subject: Comment teos2 SNF 2009-08-20 23:52:47: TUBE IS BACK AND RUNNING LIKE A CHARM! Message-ID: archive From maurice at snf.stanford.edu Tue Aug 25 13:38:15 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 25 Aug 2009 13:38:15 -0700 Subject: Comment teos2 SNF 2009-08-18 09:39:49: TEOS tube sent out for repair Message-ID: tube back and installed From maurice at snf.stanford.edu Tue Aug 25 13:38:39 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 25 Aug 2009 13:38:39 -0700 Subject: Comment teos2 SNF 2009-08-11 12:40:53: Replaced MFC Message-ID: archive From pponce at snf.stanford.edu Fri Aug 28 23:06:48 2009 From: pponce at snf.stanford.edu (pponce at snf.stanford.edu) Date: Fri, 28 Aug 2009 23:06:48 -0700 Subject: Problem teos2 SNF 2009-08-28 23:06:48: broken dummy wafer Message-ID: Upon opening the furnace tube the rearmost dummy wafer was visibly broken in half. The wafer has been removed. From seymour at snf.stanford.edu Mon Aug 31 08:31:47 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 31 Aug 2009 08:31:47 -0700 Subject: Problem teos2 SNF 2009-08-28 23:06:48: broken dummy wafer Message-ID: tube is working fine, not a problem From pponce at snf.stanford.edu Mon Aug 31 17:42:06 2009 From: pponce at snf.stanford.edu (pponce at snf.stanford.edu) Date: Mon, 31 Aug 2009 17:42:06 -0700 Subject: Problem teos2 SNF 2009-08-31 17:42:06: Deposition Pressure unstable Message-ID: Deposition pressure will not stay at 1200 for long. Still reaching up to 1600 within 12 mins.