Problem teos2 SNF 2009-08-05 18:36:23: MFS Alarm

cmcg at snf.stanford.edu cmcg at snf.stanford.edu
Wed Aug 5 18:36:23 PDT 2009


TEOS flow hit 130sccm after wild fluctuations during the dep (set for 60)
Pressure slowly increased through run, going from nominal 1200 up to 1500mTorr at one point
One of these two issues triggered a MFS Alarm.




More information about the teos2-pcs mailing list