Shutdown teos2 SNF 2009-08-24 06:11:16: teos mt

seymour at snf.stanford.edu seymour at snf.stanford.edu
Mon Aug 24 10:42:23 PDT 2009


TEOS container changed. Good base and leak rate TEOS flow ok. 
With 500 SCCM N2 the process pressure is 361 mT




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