From maurice at snf.stanford.edu  Tue Jan  6 10:02:26 2009
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Tue, 6 Jan 2009 10:02:26 -0800
Subject: Comment teos2 SNF 2009-01-06 10:02:25: needs a test after shutdown
Message-ID: <mailman.530.1356283490.4766.teos2-pcs@snf.stanford.edu>




From panjun at snf.stanford.edu  Fri Jan  9 22:42:50 2009
From: panjun at snf.stanford.edu (panjun at snf.stanford.edu)
Date: Fri, 9 Jan 2009 22:42:50 -0800
Subject: Comment teos2 SNF 2009-01-09 22:42:50: tested
Message-ID: <mailman.531.1356283490.4766.teos2-pcs@snf.stanford.edu>

worked well, got 1600 A after 30 min deposition



From panjun at snf.stanford.edu  Mon Jan 19 12:12:17 2009
From: panjun at snf.stanford.edu (panjun at snf.stanford.edu)
Date: Mon, 19 Jan 2009 12:12:17 -0800
Subject: Problem teos2 SNF 2009-01-19 12:12:17: how to turn on the light 
Message-ID: <mailman.532.1356283490.4766.teos2-pcs@snf.stanford.edu>

how to turn on the light above the tube?  it's to dark to inspect the wafers.



From panjun at snf.stanford.edu  Mon Jan 19 22:26:00 2009
From: panjun at snf.stanford.edu (panjun at snf.stanford.edu)
Date: Mon, 19 Jan 2009 22:26:00 -0800
Subject: Problem teos2 SNF 2009-01-19 22:25:59: mfs alarm at step 30
Message-ID: <mailman.533.1356283490.4766.teos2-pcs@snf.stanford.edu>

kept having mfs alarm at the begining of step 30.  the oxygen light on the  panel board was flashing.  i tried to unload and reload, but still had the same problem. 
it was fine during my deposition in the morning.



From tberg at snf.stanford.edu  Tue Jan 20 06:27:27 2009
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Tue, 20 Jan 2009 06:27:27 -0800
Subject: Shutdown teos2 SNF 2009-01-20 06:27:27: pumping line plugged
Message-ID: <mailman.534.1356283490.4766.teos2-pcs@snf.stanford.edu>




From tberg at snf.stanford.edu  Tue Jan 20 07:21:56 2009
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Tue, 20 Jan 2009 07:21:56 -0800
Subject: Shutdown teos2 SNF 2009-01-20 06:27:27: pumping line plugged
Message-ID: <mailman.535.1356283490.4766.teos2-pcs@snf.stanford.edu>

Cleaned pump line



From tberg at snf.stanford.edu  Tue Jan 20 07:22:30 2009
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Tue, 20 Jan 2009 07:22:30 -0800
Subject: Problem teos2 SNF 2009-01-19 22:25:59: mfs alarm at step 30
Message-ID: <mailman.536.1356283490.4766.teos2-pcs@snf.stanford.edu>

Pressure was too high. Cleaned pump line



From tberg at snf.stanford.edu  Tue Jan 20 07:22:47 2009
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Tue, 20 Jan 2009 07:22:47 -0800
Subject: Problem teos2 SNF 2009-01-19 12:12:17: how to turn on the light 
Message-ID: <mailman.537.1356283490.4766.teos2-pcs@snf.stanford.edu>

Replaced 4 lamps



From shott at snf.stanford.edu  Tue Jan 20 07:43:18 2009
From: shott at snf.stanford.edu (shott at snf.stanford.edu)
Date: Tue, 20 Jan 2009 07:43:18 -0800
Subject: Comment teos2 SNF 2008-09-09 00:54:41: dep rate
Message-ID: <mailman.538.1356283490.4766.teos2-pcs@snf.stanford.edu>

To the archives ...



From shott at snf.stanford.edu  Tue Jan 20 07:43:27 2009
From: shott at snf.stanford.edu (shott at snf.stanford.edu)
Date: Tue, 20 Jan 2009 07:43:27 -0800
Subject: Comment teos2 SNF 2008-09-25 19:27:06: tube running w/o MFS ALARM
Message-ID: <mailman.539.1356283490.4766.teos2-pcs@snf.stanford.edu>

To the archives ...