Problem teos2 SNF 2009-07-01 15:30:45: 60% lower dep rate

cmcg at snf.stanford.edu cmcg at snf.stanford.edu
Wed Jul 1 15:30:46 PDT 2009


min pump down pressure: 22.4mTorr (good)
leak check pressure:  55mTorr (higher than usual)
deposition pressure:  1300mTorr (typical, checked at begining of run)
gas flows all at set point
TEOS 75% full
dep rate: 22-24 A/min
typical:  35-40 A/min




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