Comment teos2 SNF 2009-07-16 09:07:14: creamy white gunk on wafer

cmcg at snf.stanford.edu cmcg at snf.stanford.edu
Thu Jul 16 09:07:15 PDT 2009


What looks to be a large splotch of creamy white gunk was smeared all over the wafer during the deposition.  I've seen this before and am not sure what causes it, but it is very messy looking and may have potentially bad side effects.




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