Comment teos2 SNF 2009-07-16 09:07:14: creamy white gunk on wafer
tberg at snf.stanford.edu
tberg at snf.stanford.edu
Wed Jul 29 09:16:12 PDT 2009
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Comment teos2 SNF 2009-07-16 09:07:14: creamy white gunk on wafer
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Comment teos2 SNF 2009-07-27 16:59:34: Process pressure is high
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Suspect POCl3 drip from above
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Comment teos2 SNF 2009-07-16 09:07:14: creamy white gunk on wafer
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Comment teos2 SNF 2009-07-27 16:59:34: Process pressure is high
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