From panjun at snf.stanford.edu Sat May 9 19:47:15 2009 From: panjun at snf.stanford.edu (panjun at snf.stanford.edu) Date: Sat, 9 May 2009 19:47:15 -0700 Subject: Shutdown teos2 SNF 2009-05-09 19:47:15: the tube stuck in the middle Message-ID: the tube suddenly stopped in the middle of the unloading process. It doesn't move in or out. The manual mode doesn't work either. Asked around and nobody seems understand what to do. I have to let the tube open and shut down the machine. From seymour at snf.stanford.edu Mon May 11 08:49:11 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 11 May 2009 08:49:11 -0700 Subject: Shutdown teos2 SNF 2009-05-09 19:47:15: the tube stuck in the middle Message-ID: replaced loader motor From tberg at snf.stanford.edu Wed May 13 07:21:31 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 13 May 2009 07:21:31 -0700 Subject: Shutdown teos2 SNF 2009-05-13 07:21:30: Won't pump Message-ID: From seymour at snf.stanford.edu Fri May 15 15:07:15 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 15 May 2009 15:07:15 -0700 Subject: Shutdown teos2 SNF 2009-05-13 07:21:30: Won't pump Message-ID: installed clean tube and rebuilt loader. needs a coat and test after repair From seymour at snf.stanford.edu Fri May 15 15:07:46 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 15 May 2009 15:07:46 -0700 Subject: Problem teos2 SNF 2009-05-15 15:07:45: needs coat and test Message-ID: tube and loader replaced. From cmcg at snf.stanford.edu Sat May 16 10:37:58 2009 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Sat, 16 May 2009 10:37:58 -0700 Subject: Problem teos2 SNF 2009-05-16 10:37:57: O2 interlock Message-ID: MFS Alarm on step 30 of TEOS2STD O2 interlock error on back controller O2 flow should be 750 but was 0 From seymour at snf.stanford.edu Mon May 18 09:00:19 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 18 May 2009 09:00:19 -0700 Subject: Shutdown teos2 SNF 2009-05-18 09:00:19: tube leaking Message-ID: From tberg at snf.stanford.edu Mon May 18 13:12:03 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 18 May 2009 13:12:03 -0700 Subject: Comment teos2 SNF 2009-05-18 13:12:03: Waiting for Tube Message-ID: From seymour at snf.stanford.edu Thu May 21 14:14:01 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 21 May 2009 14:14:01 -0700 Subject: Shutdown teos2 SNF 2009-05-18 09:00:19: tube leaking Message-ID: reassembled tube and installed new baffle. base and leak rate ok. heated tube up to operating temp. Tube needs a coat and a test. From seymour at snf.stanford.edu Thu May 21 14:14:38 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 21 May 2009 14:14:38 -0700 Subject: Problem teos2 SNF 2009-05-16 10:37:57: O2 interlock Message-ID: O2 interlock is tube not closed. From seymour at snf.stanford.edu Thu May 21 14:15:05 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 21 May 2009 14:15:05 -0700 Subject: Comment teos2 SNF 2009-05-18 13:12:03: Waiting for Tube Message-ID: all quartz is in at this time. From panjun at snf.stanford.edu Thu May 21 18:04:17 2009 From: panjun at snf.stanford.edu (panjun at snf.stanford.edu) Date: Thu, 21 May 2009 18:04:17 -0700 Subject: Problem teos2 SNF 2009-05-21 18:04:16: no deposition Message-ID: wanted to test the deposition, but got no oxide after 30 min. the tube doesn't stop at step 115, but come out automatically without pressing "alarm ack". From tberg at snf.stanford.edu Fri May 22 06:39:26 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 22 May 2009 06:39:26 -0700 Subject: Comment teos2 SNF 2009-05-22 06:39:25: Checked flows and temps Message-ID: Checked flows and temps all look normal for standard recipe From seymour at snf.stanford.edu Fri May 22 11:51:07 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 22 May 2009 11:51:07 -0700 Subject: Shutdown teos2 SNF 2009-05-22 11:51:06: tube has a high leak rate Message-ID: From maurice at snf.stanford.edu Wed May 27 16:22:46 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 27 May 2009 16:22:46 -0700 Subject: Shutdown teos2 SNF 2009-05-22 11:51:06: tube has a high leak rate Message-ID: Fixed...not sure what he did...needs test From maurice at snf.stanford.edu Wed May 27 16:22:58 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 27 May 2009 16:22:58 -0700 Subject: Problem teos2 SNF 2009-05-27 16:22:58: Testing Message-ID: From rik at snf.stanford.edu Wed May 27 16:43:36 2009 From: rik at snf.stanford.edu (rik at snf.stanford.edu) Date: Wed, 27 May 2009 16:43:36 -0700 Subject: Comment teos2 SNF 2009-05-27 16:43:35: Base P and Leak P look good Message-ID: Base Pressure = 27.8 Leak Pressure = 39.0 From rik at snf.stanford.edu Wed May 27 19:11:56 2009 From: rik at snf.stanford.edu (rik at snf.stanford.edu) Date: Wed, 27 May 2009 19:11:56 -0700 Subject: Comment teos2 SNF 2009-05-27 19:11:55: Deposition worked! Message-ID: From seymour at snf.stanford.edu Thu May 28 11:10:51 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 28 May 2009 11:10:51 -0700 Subject: Problem teos2 SNF 2009-05-28 11:10:51: found tube not pumped down Message-ID: This morning i found the tube in pump recipe but not pumped. checked base in manual and put tube in auto pump7 when base and leak rate came down to a good level. From seymour at snf.stanford.edu Fri May 29 13:52:47 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 29 May 2009 13:52:47 -0700 Subject: Problem teos2 SNF 2009-05-28 11:10:51: found tube not pumped down Message-ID: tube pumps ok tube has been ran since yesterday From seymour at snf.stanford.edu Fri May 29 13:53:25 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 29 May 2009 13:53:25 -0700 Subject: Problem teos2 SNF 2009-05-21 18:04:16: no deposition Message-ID: tube has been running ok since yesterday