Problem teos2 SNF 2009-05-21 18:04:16: no deposition

panjun at panjun at
Thu May 21 18:04:17 PDT 2009

wanted to test the deposition, but got no oxide after 30 min.
the tube doesn't stop at step 115, but come out automatically without pressing "alarm ack".

More information about the teos2-pcs mailing list