Problem teos2 SNF 2009-05-21 18:04:16: no deposition

panjun at snf.stanford.edu panjun at snf.stanford.edu
Thu May 21 18:04:17 PDT 2009


wanted to test the deposition, but got no oxide after 30 min.
the tube doesn't stop at step 115, but come out automatically without pressing "alarm ack".
 




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