From yoonjin at snf.stanford.edu Tue Oct 6 03:59:56 2009 From: yoonjin at snf.stanford.edu (yoonjin at snf.stanford.edu) Date: Tue, 6 Oct 2009 03:59:56 -0700 Subject: Problem teos2 SNF 2009-10-06 03:59:55: broken dummy wafer Message-ID: - Deposition pressure was higher than 1200. Reaching up to 1950 and process was stopped. - I saw a broken dummy wafer when unloading. - I replaced it but I didn't try a new run. From seymour at snf.stanford.edu Tue Oct 6 14:04:15 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 6 Oct 2009 14:04:15 -0700 Subject: Problem teos2 SNF 2009-10-06 03:59:55: broken dummy wafer Message-ID: cleaned pumpline and trap. Good base pressure and leak rate. Process pressure good with gas flowing. From jprovine at snf.stanford.edu Tue Oct 13 02:46:45 2009 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 13 Oct 2009 02:46:45 -0700 Subject: Shutdown teos2 SNF 2009-10-13 02:46:44: MFS alarms and no program will run Message-ID: during user rik's run the system alarmed out without completing deposition. unknown what step the process had reached. subsequent efforts to restart yielded continuous MFS alarms on all steps after boat in. wafers removed and pump7 program loaded, but it also fails upon first pump step. system cannot be pumped and is currently vented. From seymour at snf.stanford.edu Wed Oct 14 09:08:20 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 14 Oct 2009 09:08:20 -0700 Subject: Comment teos2 SNF 2009-10-14 09:08:19: installing tube Message-ID: I am putting system back together at this time and will coat it when complete. From seymour at snf.stanford.edu Thu Oct 15 08:31:09 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 15 Oct 2009 08:31:09 -0700 Subject: Shutdown teos2 SNF 2009-10-13 02:46:44: MFS alarms and no program will run Message-ID: pulled and replaced tube. Ran a coat cycle now tube needs a test. From seymour at snf.stanford.edu Thu Oct 15 08:32:03 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 15 Oct 2009 08:32:03 -0700 Subject: Problem teos2 SNF 2009-10-15 08:32:03: needs testing Message-ID: tube has been replaced and coated. Needs test after repair. From cmcg at snf.stanford.edu Thu Oct 15 09:20:09 2009 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Thu, 15 Oct 2009 09:20:09 -0700 Subject: Problem teos2 SNF 2009-10-15 09:20:09: pump cycle keeps aborting Message-ID: From seymour at snf.stanford.edu Thu Oct 15 10:35:52 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 15 Oct 2009 10:35:52 -0700 Subject: Comment teos2 SNF 2009-10-15 10:35:51: failing pump recipe leak check. Message-ID: I put the tube in manual and pumped it down. Base was 45 mT and leak rate above 80 mT/min. I pumped the tube with N2 flowing for about 10 mins and base was 17 and rate of rise was 22 per min. I put the tube in auto run pump7. I believe the increased base and ror was due to TEOS in the system that needed time to pump out. From cmcg at snf.stanford.edu Fri Oct 16 19:24:38 2009 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Fri, 16 Oct 2009 19:24:38 -0700 Subject: Comment teos2 SNF 2009-10-16 19:24:38: run report Message-ID: Front: 1308A std: 70.7A Middle: 1740A std: 65.2A Back: 2000A std: 67.2A Dep rate: 43.59-66.65 A/min This is much higher than typical..... From cmcg at snf.stanford.edu Fri Oct 16 20:25:29 2009 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Fri, 16 Oct 2009 20:25:29 -0700 Subject: Problem teos2 SNF 2009-10-16 20:25:29: teos temp alarm Message-ID: temp alarm on teos container: set point: 75.2 actual: 71.8 From cmcg at snf.stanford.edu Sat Oct 17 00:11:18 2009 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Sat, 17 Oct 2009 00:11:18 -0700 Subject: Problem teos2 SNF 2009-10-17 00:11:17: failed leak check Message-ID: base pressure 40mTorr, gauge in back read ~20 immediately failed leak check, 10-20sec will leave pumped down overnight, hopefully this will help From pponce at snf.stanford.edu Sat Oct 17 07:49:58 2009 From: pponce at snf.stanford.edu (pponce at snf.stanford.edu) Date: Sat, 17 Oct 2009 07:49:58 -0700 Subject: Problem teos2 SNF 2009-10-17 07:49:58: alarm: teos tank temp Message-ID: The sensor alarm connected to the TEOS tank is going off. The temperature is 2 degrees lower than the TEOS set temperature (75). From pponce at snf.stanford.edu Sat Oct 17 11:23:51 2009 From: pponce at snf.stanford.edu (pponce at snf.stanford.edu) Date: Sat, 17 Oct 2009 11:23:51 -0700 Subject: Problem teos2 SNF 2009-10-17 11:23:50: pump failed 2x Message-ID: The pump program aborted twice after running a deposition. It worked on the third try. From tberg at snf.stanford.edu Mon Oct 19 06:43:19 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 19 Oct 2009 06:43:19 -0700 Subject: Shutdown teos2 SNF 2009-10-19 06:43:18: teos empty Message-ID: From seymour at snf.stanford.edu Mon Oct 19 10:02:29 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 19 Oct 2009 10:02:29 -0700 Subject: Problem teos2 SNF 2009-10-16 20:25:29: teos temp alarm Message-ID: container was empty From seymour at snf.stanford.edu Mon Oct 19 10:03:16 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 19 Oct 2009 10:03:16 -0700 Subject: Problem teos2 SNF 2009-10-17 00:11:17: failed leak check Message-ID: passed leak check From seymour at snf.stanford.edu Mon Oct 19 10:04:11 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 19 Oct 2009 10:04:11 -0700 Subject: Problem teos2 SNF 2009-10-17 07:49:58: alarm: teos tank temp Message-ID: container replaced From seymour at snf.stanford.edu Mon Oct 19 10:04:46 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 19 Oct 2009 10:04:46 -0700 Subject: Problem teos2 SNF 2009-10-17 11:23:50: pump failed 2x Message-ID: pumps downs ok From seymour at snf.stanford.edu Mon Oct 19 10:06:15 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 19 Oct 2009 10:06:15 -0700 Subject: Shutdown teos2 SNF 2009-10-19 06:43:18: teos empty Message-ID: replaced teos source. Base pressure good< leak rate good. I flowed teos and Oxygen at recipe levels and flows ok. From seymour at snf.stanford.edu Mon Oct 19 10:07:50 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 19 Oct 2009 10:07:50 -0700 Subject: Problem teos2 SNF 2009-10-19 10:07:49: needs testing Message-ID: test required after source change From cmcg at snf.stanford.edu Mon Oct 19 13:54:48 2009 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Mon, 19 Oct 2009 13:54:48 -0700 Subject: Shutdown teos2 SNF 2009-10-19 13:54:47: O2 interlock Message-ID: O2 interlock alarm. My wafers are inside, I would like to do a test run when possible. From seymour at snf.stanford.edu Mon Oct 19 14:16:37 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 19 Oct 2009 14:16:37 -0700 Subject: Shutdown teos2 SNF 2009-10-19 13:54:47: O2 interlock Message-ID: found the tube in pump recipe. I put it in manual and gave the MFS460 a setpoint of 300 for Oxygen. I then turned on and flowed Oxygen at setpoint. No allarms or faults found. Tube back in pump7. From cmcg at snf.stanford.edu Mon Oct 19 15:18:10 2009 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Mon, 19 Oct 2009 15:18:10 -0700 Subject: Problem teos2 SNF 2009-10-19 15:18:09: still having O2 interlock fault Message-ID: O2 interlock still alarming. I will vent and inspect the door seal and try running again. From cmcg at snf.stanford.edu Mon Oct 19 17:52:47 2009 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Mon, 19 Oct 2009 17:52:47 -0700 Subject: Comment teos2 SNF 2009-10-19 17:52:46: O2 interlock status Message-ID: I wiped the inner seal of the door before running. O2 interlock alarm still occured, but I let the run continue. Its passed leak check and the deposition ran as normal. From cmcg at snf.stanford.edu Mon Oct 19 21:48:52 2009 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Mon, 19 Oct 2009 21:48:52 -0700 Subject: Comment teos2 SNF 2009-10-19 21:48:51: test run report Message-ID: (back wafer to front wafer) Thickness: 1376.8 1346.8 1203.8 1264.8 1132 995.4 846 std: 41.55 33.66 37.62 42.08 58.66 44.98 58.43 Average thickness: 1166.5 A Average std: 45.3 A Average Dep rate: 38.88 A/min From cmcg at snf.stanford.edu Mon Oct 19 22:51:05 2009 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Mon, 19 Oct 2009 22:51:05 -0700 Subject: Problem teos2 SNF 2009-10-19 22:51:05: failed leak check Message-ID: base pressure: 23.4mTorr leak rate: up to 60mTorr in ~30-40sec From seymour at snf.stanford.edu Tue Oct 20 10:44:55 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 20 Oct 2009 10:44:55 -0700 Subject: Problem teos2 SNF 2009-10-19 22:51:05: failed leak check Message-ID: put tube in manual and did a leak check. base was 17 mT ror was 20 mT/min. tube is good. From seymour at snf.stanford.edu Tue Oct 20 10:45:44 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 20 Oct 2009 10:45:44 -0700 Subject: Comment teos2 SNF 2009-10-20 10:45:43: leak check passed. Message-ID: The base was 17 mT and the ROR was 20 mT/min From cmcg at snf.stanford.edu Tue Oct 20 19:36:46 2009 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Tue, 20 Oct 2009 19:36:46 -0700 Subject: Problem teos2 SNF 2009-10-20 19:36:45: barely passed leak check Message-ID: base: 21.9mTorr leak check reached 63mTorr at the very end of the 1min leak check step. This should have failed, but the program continued, so maybe this happened just after the end of the step. Leak rate: 41mTorr/min From cmcg at snf.stanford.edu Tue Oct 20 19:44:44 2009 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Tue, 20 Oct 2009 19:44:44 -0700 Subject: Comment teos2 SNF 2009-10-20 19:44:43: larger range in dep rate than typical Message-ID: 10 wafers loaded, data listed back of tube to front Avg thickness: 3571.2 3788 3880.6 3668 3688.6 3266.6 3337 2598.2 2520.4 2105.8 Avg std: 70.57 57.5 45.65 22.02 37.82 52.97 14.97 62.4 34.96 81.17 Avg rate: 43.03 45.64 46.75 44.19 44.44 39.36 40.2 31.3 30.37 25.37 Range of Avg thickness: 1775A Typical for 80min dep: ~400A This may be more evidence for a leak in the tube. Oxide thickness is larger towards the back of the tube, which may suggest there is a leak in the door. From pponce at snf.stanford.edu Tue Oct 20 22:00:31 2009 From: pponce at snf.stanford.edu (pponce at snf.stanford.edu) Date: Tue, 20 Oct 2009 22:00:31 -0700 Subject: Problem teos2 SNF 2009-10-20 22:00:30: FAIL: Leak Check Message-ID: Base P was 28.8 .... leak check wasn't even close. Also, the O2 alarm went off again, producing an MFS ALARM, then wen't away after about 1-2 minutes. From pponce at snf.stanford.edu Tue Oct 20 22:28:51 2009 From: pponce at snf.stanford.edu (pponce at snf.stanford.edu) Date: Tue, 20 Oct 2009 22:28:51 -0700 Subject: Problem teos2 SNF 2009-10-20 22:28:50: FAIL: pump7 Message-ID: The pumping program failed at least once. From seymour at snf.stanford.edu Fri Oct 23 10:06:06 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 23 Oct 2009 10:06:06 -0700 Subject: Problem teos2 SNF 2009-10-20 22:28:50: FAIL: pump7 Message-ID: passes leak check now. Pump 7 recipe modified for longer pump prior to leak check check step. From seymour at snf.stanford.edu Fri Oct 23 10:07:05 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 23 Oct 2009 10:07:05 -0700 Subject: Problem teos2 SNF 2009-10-20 22:00:30: FAIL: Leak Check Message-ID: tube pumping ok at this time. Running pump7 at this time. From tberg at snf.stanford.edu Thu Oct 29 10:24:37 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 29 Oct 2009 10:24:37 -0700 Subject: Comment teos2 SNF 2009-10-29 10:24:37: Cleaned and tested Trap Message-ID: From tberg at snf.stanford.edu Thu Oct 29 10:26:10 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 29 Oct 2009 10:26:10 -0700 Subject: Problem teos2 SNF 2009-10-15 09:20:09: pump cycle keeps aborting Message-ID: passes leak check now. Pump 7 recipe modified for longer pump prior to leak check check step. From tberg at snf.stanford.edu Thu Oct 29 10:26:29 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 29 Oct 2009 10:26:29 -0700 Subject: Comment teos2 SNF 2009-10-15 10:35:51: failing pump recipe leak check. Message-ID: passes leak check now. Pump 7 recipe modified for longer pump prior to leak check check step. From tberg at snf.stanford.edu Thu Oct 29 10:26:47 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 29 Oct 2009 10:26:47 -0700 Subject: Problem teos2 SNF 2009-10-20 19:36:45: barely passed leak check Message-ID: passes leak check now. Pump 7 recipe modified for longer pump prior to leak check check step. From tberg at snf.stanford.edu Thu Oct 29 10:27:37 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 29 Oct 2009 10:27:37 -0700 Subject: Problem teos2 SNF 2009-10-15 08:32:03: needs testing Message-ID: completed From tberg at snf.stanford.edu Thu Oct 29 10:27:53 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 29 Oct 2009 10:27:53 -0700 Subject: Comment teos2 SNF 2009-10-16 19:24:38: run report Message-ID: noted From tberg at snf.stanford.edu Thu Oct 29 10:28:12 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 29 Oct 2009 10:28:12 -0700 Subject: Comment teos2 SNF 2009-10-14 09:08:19: installing tube Message-ID: completed