Problem teos2 SNF 2009-10-06 03:59:55: broken dummy wafer

yoonjin at snf.stanford.edu yoonjin at snf.stanford.edu
Tue Oct 6 03:59:56 PDT 2009


- Deposition pressure was higher than 1200. Reaching up to 1950 and process was stopped.
- I saw a broken dummy wafer when unloading.
- I replaced it but I didn't try a new run. 




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