Shutdown teos2 SNF 2009-10-13 02:46:44: MFS alarms and no program will run

jprovine at snf.stanford.edu jprovine at snf.stanford.edu
Tue Oct 13 02:46:45 PDT 2009


during user rik's run the system alarmed out without completing deposition.  unknown what step the process had reached.  subsequent efforts to restart yielded continuous MFS alarms on all steps after boat in.  wafers removed and pump7 program loaded, but it also fails upon first pump step.  system cannot be pumped and is currently vented.




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