Comment teos2 SNF 2009-10-15 10:35:51: failing pump recipe leak check.

seymour at snf.stanford.edu seymour at snf.stanford.edu
Thu Oct 15 10:35:52 PDT 2009


I put the tube in manual and pumped it down. Base was 45 mT and leak rate above 80 mT/min. I pumped the tube with N2 flowing for about 10 mins  and base was 17 and rate of rise was 22 per min. I put the tube in auto run pump7. I believe the increased base and ror was due to TEOS in the system that needed time to pump out.




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