Comment teos2 SNF 2009-10-19 17:52:46: O2 interlock status
cmcg at snf.stanford.edu
cmcg at snf.stanford.edu
Mon Oct 19 17:52:47 PDT 2009
I wiped the inner seal of the door before running. O2 interlock alarm still occured, but I let the run continue. Its passed leak check and the deposition ran as normal.
More information about the teos2-pcs
mailing list