(back wafer to front wafer) Thickness: 1376.8 1346.8 1203.8 1264.8 1132 995.4 846 std: 41.55 33.66 37.62 42.08 58.66 44.98 58.43 Average thickness: 1166.5 A Average std: 45.3 A Average Dep rate: 38.88 A/min