Comment teos2 SNF 2009-10-19 21:48:51: test run report

cmcg at snf.stanford.edu cmcg at snf.stanford.edu
Mon Oct 19 21:48:52 PDT 2009


(back wafer to front wafer)
Thickness: 1376.8  1346.8  1203.8  1264.8  1132  995.4  846  
std: 41.55 33.66  37.62  42.08  58.66  44.98  58.43
Average thickness: 1166.5 A
Average std: 45.3 A
Average Dep rate: 38.88 A/min




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