Problem teos2 SNF 2009-10-20 19:36:45: barely passed leak check

cmcg at snf.stanford.edu cmcg at snf.stanford.edu
Tue Oct 20 19:36:46 PDT 2009


base: 21.9mTorr
leak check reached 63mTorr at the very end of the 1min leak check step.  This should have failed, but the program continued, so maybe this happened just after the end of the step.
Leak rate: 41mTorr/min




More information about the teos2-pcs mailing list