Comment teos2 SNF 2009-10-20 19:44:43: larger range in dep rate than typical

cmcg at snf.stanford.edu cmcg at snf.stanford.edu
Tue Oct 20 19:44:44 PDT 2009


10 wafers loaded, data listed back of tube to front
Avg thickness: 3571.2  3788  3880.6  3668  3688.6  3266.6  3337  2598.2  2520.4 2105.8
Avg std: 70.57  57.5  45.65  22.02  37.82  52.97  14.97  62.4  34.96  81.17
Avg rate:  43.03  45.64  46.75  44.19  44.44  39.36  40.2  31.3  30.37  25.37
Range of Avg thickness: 1775A
Typical for 80min dep: ~400A
This may be more evidence for a leak in the tube.  Oxide thickness is larger towards the back of the tube, which may suggest there is a leak in the door.




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