From seymour at snf.stanford.edu Tue Sep 1 08:45:53 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 1 Sep 2009 08:45:53 -0700 Subject: Problem teos2 SNF 2009-08-31 17:42:06: Deposition Pressure unstable Message-ID: ran tube in manual with 500 sccm N2 flowing. Adjusted throttle valve controller gain and rate for steady pressure control of 1200. The pressure was stable at 1200 for 25 mins. I then turned on 300 O2 and 70 TEOS and the pressure control set at 1200 and it was maintained at the setpoint. From cmcg at snf.stanford.edu Wed Sep 9 13:06:42 2009 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Wed, 9 Sep 2009 13:06:42 -0700 Subject: Shutdown teos2 SNF 2009-09-09 13:06:42: dep pressure 1960 mTorr Message-ID: pressure during deposition slowly rose until it reached ~1960 mTorr, at which point tripped some interlock and the run aborted. Previous use also noted this problem in the log book. From seymour at snf.stanford.edu Wed Sep 9 15:27:07 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 9 Sep 2009 15:27:07 -0700 Subject: Shutdown teos2 SNF 2009-09-09 13:06:42: dep pressure 1960 mTorr Message-ID: tube pumped to base of 19 mT and leak rate of 10 mT/min. Ted ran 300 O2 and 70 TEOS with a pressure setting of 1200 mT and it controlled fine. From cmcg at snf.stanford.edu Thu Sep 10 15:30:51 2009 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Thu, 10 Sep 2009 15:30:51 -0700 Subject: Shutdown teos2 SNF 2009-09-10 15:30:50: FAILED LEAK CHECK Message-ID: After the tool was brought online yesterday: 1) first run passed leack check, but pressure slowly increased during dep until it exceeded 2000 and run was aborted. This was the third time in a row this behavior was observed. 2) tube ran successfully Today 3) Tube ran successfully 4) Failed leak check 5) Failed leak check From tberg at snf.stanford.edu Fri Sep 11 10:00:30 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 11 Sep 2009 10:00:30 -0700 Subject: Shutdown teos2 SNF 2009-09-10 15:30:50: FAILED LEAK CHECK Message-ID: checked out system looks OK now From tberg at snf.stanford.edu Fri Sep 11 10:01:02 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 11 Sep 2009 10:01:02 -0700 Subject: Problem teos2 SNF 2009-09-11 10:01:01: Possible pressure issues Message-ID: Open for observation From tberg at snf.stanford.edu Mon Sep 14 11:56:43 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 14 Sep 2009 11:56:43 -0700 Subject: Comment teos2 SNF 2009-09-14 11:56:42: system has high base pressure Message-ID: system has high base pressure. Replaced door orings andbase is improved but not great currently about 70 Mt still checking. From tberg at snf.stanford.edu Mon Sep 14 14:16:00 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 14 Sep 2009 14:16:00 -0700 Subject: Comment teos2 SNF 2009-09-14 14:15:59: base now at 60 and dropping Message-ID: base now at 60 and dropping Will continue leak testing From tberg at snf.stanford.edu Tue Sep 15 06:11:39 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 15 Sep 2009 06:11:39 -0700 Subject: Shutdown teos2 SNF 2009-09-15 06:11:38: leaks Message-ID: From seymour at snf.stanford.edu Wed Sep 16 11:30:04 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 16 Sep 2009 11:30:04 -0700 Subject: Shutdown teos2 SNF 2009-09-15 06:11:38: leaks Message-ID: Pulled the tube and replaced all the orings. reassembled sustem and did leak check. turned on element breaker and when hot did another leak check. Base good at 19 mT, ROR was 5 mT/min. From seymour at snf.stanford.edu Wed Sep 16 11:30:29 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 16 Sep 2009 11:30:29 -0700 Subject: Comment teos2 SNF 2009-09-14 11:56:42: system has high base pressure Message-ID: base good now. From seymour at snf.stanford.edu Wed Sep 16 11:30:45 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 16 Sep 2009 11:30:45 -0700 Subject: Comment teos2 SNF 2009-09-14 14:15:59: base now at 60 and dropping Message-ID: base good now From seymour at snf.stanford.edu Wed Sep 16 11:30:53 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 16 Sep 2009 11:30:53 -0700 Subject: Problem teos2 SNF 2009-09-11 10:01:01: Possible pressure issues Message-ID: From seymour at snf.stanford.edu Wed Sep 16 11:32:19 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 16 Sep 2009 11:32:19 -0700 Subject: Problem teos2 SNF 2009-09-16 11:32:18: keeping tube under abservation Message-ID: From cmcg at snf.stanford.edu Wed Sep 16 17:03:18 2009 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Wed, 16 Sep 2009 17:03:18 -0700 Subject: Comment teos2 SNF 2009-09-16 17:03:17: pressure good, dep rate 40.7A/min, door motor finiky Message-ID: Pressure looked good during run. Dep rate was 38.6-42.8 A/min Door motor will not open initially. I loosened the clamp, opened it slightly, and retightened the clamp and it worked. From benc at snf.stanford.edu Sun Sep 20 22:50:23 2009 From: benc at snf.stanford.edu (benc at snf.stanford.edu) Date: Sun, 20 Sep 2009 22:50:23 -0700 Subject: Problem teos2 SNF 2009-09-20 22:50:22: Boat gets stuck Message-ID: as it starts to come out and has to be operated manually. From seymour at snf.stanford.edu Fri Sep 25 09:53:56 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 25 Sep 2009 09:53:56 -0700 Subject: Problem teos2 SNF 2009-09-20 22:50:22: Boat gets stuck Message-ID: adjusted the door flag to allow the door to open on its own. From seymour at snf.stanford.edu Fri Sep 25 09:54:43 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 25 Sep 2009 09:54:43 -0700 Subject: Problem teos2 SNF 2009-09-16 11:32:18: keeping tube under abservation Message-ID: The tube is operating normally.