Problem teos2 SNF 2009-08-31 17:42:06: Deposition Pressure unstable

seymour at snf.stanford.edu seymour at snf.stanford.edu
Tue Sep 1 08:45:53 PDT 2009


ran tube in manual with 500 sccm N2 flowing. Adjusted throttle valve controller gain and rate for steady pressure control of 1200. The pressure was stable at 1200 for 25 mins. I then turned on 300 O2 and 70 TEOS and the pressure control set at 1200 and it was maintained at the setpoint.




More information about the teos2-pcs mailing list