Shutdown teos2 SNF 2009-09-09 13:06:42: dep pressure 1960 mTorr

cmcg at snf.stanford.edu cmcg at snf.stanford.edu
Wed Sep 9 13:06:42 PDT 2009


pressure during deposition slowly rose until it reached ~1960 mTorr, at which point tripped some interlock and the run aborted.  Previous use also noted this problem in the log book.




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