Shutdown teos2 SNF 2009-09-09 13:06:42: dep pressure 1960 mTorr

[seymour at snf.stanford.edu]

tube pumped to base of 19 mT and leak rate of 10 mT/min. Ted ran 300 O2 and 70 TEOS with a pressure setting of 1200 mT and it controlled fine.