Shutdown teos2 SNF 2009-09-09 13:06:42: dep pressure 1960 mTorr

seymour at snf.stanford.edu seymour at snf.stanford.edu
Wed Sep 9 15:27:07 PDT 2009


tube pumped to base of 19 mT and leak rate of 10 mT/min. Ted ran 300 O2 and 70 TEOS with a pressure setting of 1200 mT and it controlled fine.




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