Shutdown teos2 SNF 2009-09-10 15:30:50: FAILED LEAK CHECK

cmcg at cmcg at
Thu Sep 10 15:30:51 PDT 2009

After the tool was brought online yesterday:
1)  first run passed leack check, but pressure slowly increased during dep until it exceeded 2000 and run was aborted.  This was the third time in a row this behavior was observed.
2)  tube ran successfully
3)  Tube ran successfully
4)  Failed leak check
5)  Failed leak check

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