From mislam at snf.stanford.edu Tue Aug 3 00:17:14 2010 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Tue, 3 Aug 2010 00:17:14 -0700 Subject: Problem teos2 SNF 2010-08-03 00:17:13: TEOS Flow wild swing Message-ID: same problem as last week, flow swings between 0 to 300sccm. At the end "TEOS INLK" and "TEOS LEAK" on the back controller. From ehsans at snf.stanford.edu Mon Aug 9 16:09:54 2010 From: ehsans at snf.stanford.edu (ehsans at snf.stanford.edu) Date: Mon, 9 Aug 2010 16:09:54 -0700 Subject: Problem teos2 SNF 2010-08-09 16:09:53: Flow Varied Widely Message-ID: Flow changed very significantly during my deposition. Between 18 and 180, as opposed to the setpoint of 60. From grahamab at snf.stanford.edu Sun Aug 15 12:31:45 2010 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Sun, 15 Aug 2010 12:31:45 -0700 Subject: Problem teos2 SNF 2010-08-15 12:31:45: still giving poor results Message-ID: 3 hour dep gave 0.13um. can someone please address the problems this tube has been having for weeks? From tberg at snf.stanford.edu Tue Aug 17 06:24:14 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 17 Aug 2010 06:24:14 -0700 Subject: Comment teos2 SNF 2010-08-17 06:24:13: Turned on Element CB heating up Message-ID: Turned on Element CB heating up From mmessana at snf.stanford.edu Tue Aug 17 16:55:00 2010 From: mmessana at snf.stanford.edu (mmessana at snf.stanford.edu) Date: Tue, 17 Aug 2010 16:55:00 -0700 Subject: Shutdown teos2 SNF 2010-08-17 16:54:59: Oxygen flow unstable Message-ID: O2 flow starts OK for the first 5 minutes of the recipe, then fluctuates wildly (it will turn off completely at some points). Process pressure also fluctuates likely due to the O2 fluctuation. This causes the deposition to abort. Debugged for a while with Maurice, but could not fix this problem. From tberg at snf.stanford.edu Thu Aug 19 06:17:21 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 19 Aug 2010 06:17:21 -0700 Subject: Shutdown teos2 SNF 2010-08-17 16:54:59: Oxygen flow unstable Message-ID: Ray monitored flow for almost an hour with no isues. Will keep in yellow for observation From tberg at snf.stanford.edu Thu Aug 19 06:17:38 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 19 Aug 2010 06:17:38 -0700 Subject: Problem teos2 SNF 2010-08-19 06:17:37: Observing flow issues Message-ID: From grahamab at snf.stanford.edu Thu Aug 19 15:54:30 2010 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Thu, 19 Aug 2010 15:54:30 -0700 Subject: Shutdown teos2 SNF 2010-08-19 15:54:29: guess what? still doesn't work Message-ID: Since my runs are typically more than an hour, I sat and watched the process from start to finish (well, until I stopped it about 2 hours into the deposition). O2 and TEOS flow were spot on for the entirety (~2hrs), but process pressure began steadily increasing after about 20-30 minutes. Continued increasing until it reached almost 1700, at which point I finally stopped it. Clearly, this will never yield predictable results and is far from the process setpoint of 1200. The recipe is only set to alarm and stop the step once the pressure has reached nearly 2000, which seems to be an unnecessarily large tolerance that will greatly affect the deposition even if it continues to completion. Whether or not there are additional problems with other gas flows I do not know, but there is no need for additional monitoring as I've already done that part. Please address this fairly well documented problem. From tberg at snf.stanford.edu Fri Aug 20 08:37:34 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 20 Aug 2010 08:37:34 -0700 Subject: Problem teos2 SNF 2010-08-19 06:17:37: Observing flow issues Message-ID: user reports flows OK From tberg at snf.stanford.edu Fri Aug 20 08:37:44 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 20 Aug 2010 08:37:44 -0700 Subject: Comment teos2 SNF 2010-08-17 06:24:13: Turned on Element CB heating up Message-ID: noted From tberg at snf.stanford.edu Fri Aug 20 09:00:48 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 20 Aug 2010 09:00:48 -0700 Subject: Shutdown teos2 SNF 2010-08-19 15:54:29: guess what? still doesn't work Message-ID: Cleaned out pump port and checked base pressur, leak rate and pressure control. All are fine at this time. I will leave it in yellow until users are satisfied From tberg at snf.stanford.edu Fri Aug 20 09:01:21 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 20 Aug 2010 09:01:21 -0700 Subject: Problem teos2 SNF 2010-08-03 00:17:13: TEOS Flow wild swing Message-ID: flows stable From tberg at snf.stanford.edu Fri Aug 20 09:01:29 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 20 Aug 2010 09:01:29 -0700 Subject: Problem teos2 SNF 2010-08-09 16:09:53: Flow Varied Widely Message-ID: flows stable From tberg at snf.stanford.edu Fri Aug 20 09:02:08 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 20 Aug 2010 09:02:08 -0700 Subject: Problem teos2 SNF 2010-07-27 02:05:02: MFS Error - TEOS flow Message-ID: flows stable From tberg at snf.stanford.edu Fri Aug 20 09:02:25 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 20 Aug 2010 09:02:25 -0700 Subject: Comment teos2 SNF 2010-07-27 08:56:42: Pumped out Teos Line Message-ID: noted From tberg at snf.stanford.edu Fri Aug 20 09:02:49 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 20 Aug 2010 09:02:49 -0700 Subject: Problem teos2 SNF 2010-07-27 22:57:16: MFS Error Message-ID: flows stable From seymour at snf.stanford.edu Fri Aug 20 14:48:51 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 20 Aug 2010 14:48:51 -0700 Subject: Shutdown teos2 SNF 2010-08-20 14:48:50: process pressure fault tube shutdown Message-ID: About 30 mins into the run the pressure went to 2 T. The pumpline pressure after the trap indicated the flow restricted at the trap. I will rebuild the trap on Monday AM. From tberg at snf.stanford.edu Mon Aug 23 10:59:40 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 23 Aug 2010 10:59:40 -0700 Subject: Shutdown teos2 SNF 2010-08-20 14:48:50: process pressure fault tube shutdown Message-ID: Cleaned trap, base and leak rate good. Pressure is controlling well at this time. Will leave it yellow for now From maurice at snf.stanford.edu Mon Aug 30 17:48:14 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 30 Aug 2010 17:48:14 -0700 Subject: Problem teos2 SNF 2010-08-15 12:31:45: still giving poor results Message-ID: User cfchiang reports that Teos2 giving repeatable results