From mislam at snf.stanford.edu Wed Jul 7 11:07:09 2010 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Wed, 7 Jul 2010 11:07:09 -0700 Subject: Problem teos2 SNF 2010-07-07 11:07:08: Deposition pressure not holding Message-ID: Pressure during deposition keeps going up. Deposition stops after few mintute into deposition due to pressure being too high. From seymour at snf.stanford.edu Thu Jul 8 10:43:37 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 8 Jul 2010 10:43:37 -0700 Subject: Problem teos2 SNF 2010-07-07 11:07:08: Deposition pressure not holding Message-ID: cleaned pump line trap. base pressure 17 mT ror was 10 mT. From mislam at snf.stanford.edu Wed Jul 14 21:04:27 2010 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Wed, 14 Jul 2010 21:04:27 -0700 Subject: Problem teos2 SNF 2010-07-14 21:04:26: TEOS low Message-ID: Level shows 15%, "LEVEL" alarm blinking From mislam at snf.stanford.edu Wed Jul 14 21:16:53 2010 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Wed, 14 Jul 2010 21:16:53 -0700 Subject: Problem teos2 SNF 2010-07-14 21:16:51: TEOS flow fluctuates Message-ID: It seems to go back and forth between 40 and 70 sccm From tberg at snf.stanford.edu Thu Jul 15 06:11:11 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 15 Jul 2010 06:11:11 -0700 Subject: Shutdown teos2 SNF 2010-07-15 06:11:10: TEOS Empty Message-ID: From seymour at snf.stanford.edu Thu Jul 15 08:18:55 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 15 Jul 2010 08:18:55 -0700 Subject: Comment teos2 SNF 2010-07-15 08:18:55: TEOS canister changed Message-ID: Heating up to temp at this time. will need test after temp reached From seymour at snf.stanford.edu Fri Jul 16 07:56:18 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 16 Jul 2010 07:56:18 -0700 Subject: Shutdown teos2 SNF 2010-07-15 06:11:10: TEOS Empty Message-ID: canister changed leak check ok. flowed teos to setpoint. needs test From seymour at snf.stanford.edu Fri Jul 16 07:56:52 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 16 Jul 2010 07:56:52 -0700 Subject: Problem teos2 SNF 2010-07-14 21:16:51: TEOS flow fluctuates Message-ID: canister changed From seymour at snf.stanford.edu Fri Jul 16 07:57:14 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 16 Jul 2010 07:57:14 -0700 Subject: Problem teos2 SNF 2010-07-14 21:04:26: TEOS low Message-ID: canister changed From seymour at snf.stanford.edu Fri Jul 16 07:57:35 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 16 Jul 2010 07:57:35 -0700 Subject: Problem teos2 SNF 2010-07-16 07:57:34: needs test after teos changed Message-ID: From maurice at snf.stanford.edu Wed Jul 21 14:23:02 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 21 Jul 2010 14:23:02 -0700 Subject: Comment teos2 SNF 2010-07-21 14:23:02: testing after canister change Message-ID: From maurice at snf.stanford.edu Thu Jul 22 09:58:30 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 22 Jul 2010 09:58:30 -0700 Subject: Comment teos2 SNF 2010-07-21 14:23:02: testing after canister change Message-ID: Ran standard program for 00:16:00 expected ~900ang Actual 846 ang From maurice at snf.stanford.edu Thu Jul 22 09:58:36 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 22 Jul 2010 09:58:36 -0700 Subject: Problem teos2 SNF 2010-07-16 07:57:34: needs test after teos changed Message-ID: Ran standard program for 00:16:00 expected ~900ang Actual 846 ang From maurice at snf.stanford.edu Thu Jul 22 09:58:45 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 22 Jul 2010 09:58:45 -0700 Subject: Comment teos2 SNF 2010-07-15 08:18:55: TEOS canister changed Message-ID: logged From mislam at snf.stanford.edu Tue Jul 27 02:05:03 2010 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Tue, 27 Jul 2010 02:05:03 -0700 Subject: Problem teos2 SNF 2010-07-27 02:05:02: MFS Error - TEOS flow Message-ID: TEOS flow started to swing between 0sccm to 120 sccm. At one point both TEOS and O2 gas flow stopped but deposition steps continues. From tberg at snf.stanford.edu Tue Jul 27 08:56:42 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 27 Jul 2010 08:56:42 -0700 Subject: Comment teos2 SNF 2010-07-27 08:56:42: Pumped out Teos Line Message-ID: Pumped out Teos Line ran O2 and TEOS looked OKm will keep op[en to observe. From mislam at snf.stanford.edu Tue Jul 27 22:57:17 2010 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Tue, 27 Jul 2010 22:57:17 -0700 Subject: Problem teos2 SNF 2010-07-27 22:57:16: MFS Error Message-ID: TEOS flow started to jump up and down 3min into dep, getting as high as 300sccm, eventually droping to zero. Controller at the back says "TEOS INTLK" and later "TEOS LEAK". From tberg at snf.stanford.edu Wed Jul 28 13:44:36 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 28 Jul 2010 13:44:36 -0700 Subject: Comment teos2 SNF 2010-07-28 13:44:36: Pumped out System again Message-ID: Pumped out System again. Checked flows-will continue to observe