Problem teos2 SNF 2010-07-14 21:16:51: TEOS flow fluctuates
mislam at snf.stanford.edu
mislam at snf.stanford.edu
Wed Jul 14 21:16:53 PDT 2010
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Problem teos2 SNF 2010-07-14 21:04:26: TEOS low
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Problem teos2 SNF 2010-07-14 21:16:51: TEOS flow fluctuates
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It seems to go back and forth between 40 and 70 sccm
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Problem teos2 SNF 2010-07-14 21:04:26: TEOS low
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Problem teos2 SNF 2010-07-14 21:16:51: TEOS flow fluctuates
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