Problem teos2 SNF 2010-07-27 02:05:02: MFS Error - TEOS flow

mislam at mislam at
Tue Jul 27 02:05:03 PDT 2010

TEOS flow started to swing between 0sccm to 120 sccm. At one point both TEOS and O2 gas flow stopped but deposition steps continues. 

More information about the teos2-pcs mailing list