Problem teos2 SNF 2010-07-27 02:05:02: MFS Error - TEOS flow

mislam at snf.stanford.edu mislam at snf.stanford.edu
Tue Jul 27 02:05:03 PDT 2010


TEOS flow started to swing between 0sccm to 120 sccm. At one point both TEOS and O2 gas flow stopped but deposition steps continues. 




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