Problem teos2 SNF 2010-07-27 22:57:16: MFS Error

mislam at snf.stanford.edu mislam at snf.stanford.edu
Tue Jul 27 22:57:17 PDT 2010

Previous message: Comment teos2 SNF 2010-07-27 08:56:42: Pumped out Teos Line
Next message: Comment teos2 SNF 2010-07-28 13:44:36: Pumped out System again
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

TEOS flow started to jump up and down 3min into dep, getting as high as 300sccm, eventually droping to zero. Controller at the back says "TEOS INTLK" and later "TEOS LEAK".

Previous message: Comment teos2 SNF 2010-07-27 08:56:42: Pumped out Teos Line
Next message: Comment teos2 SNF 2010-07-28 13:44:36: Pumped out System again
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the teos2-pcs mailing list