Problem teos2 SNF 2010-07-27 22:57:16: MFS Error

mislam at snf.stanford.edu mislam at snf.stanford.edu
Tue Jul 27 22:57:17 PDT 2010


TEOS flow started to jump up and down 3min into dep, getting as high as 300sccm, eventually droping to zero. Controller at the back says "TEOS INTLK" and later "TEOS LEAK". 




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