Shutdown teos2 SNF 2010-05-06 01:54:00: Pressure not steady during dep

mislam at snf.stanford.edu mislam at snf.stanford.edu
Thu May 6 01:54:01 PDT 2010


Durring deposition pressure keeps rising, eventually deposition stops. Tried 3 times with same result. Base pressure kind of high.




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