Shutdown teos2 SNF 2010-05-06 01:54:00: Pressure not steady during dep

seymour at snf.stanford.edu seymour at snf.stanford.edu
Thu May 6 09:56:48 PDT 2010


baked out the pump line trap. base pressure and ROR are good. Process pressure with 500 SCCM N2 was 440 mT. System looks good. needs a test




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