From kavehm at snf.stanford.edu  Tue Nov 16 15:34:09 2010
From: kavehm at snf.stanford.edu (kavehm at snf.stanford.edu)
Date: Tue, 16 Nov 2010 15:34:09 -0800
Subject: Comment teos2 SNF 2010-11-16 15:34:09: MFS Alarm
Message-ID: <mailman.854.1356283493.4766.teos2-pcs@snf.stanford.edu>

Got MFS alarm during initial pump step. Process pressure showed as 2000 and despite multiple Ack attempts had to Abort program. Immediately re-Ran program and pressed Ack to skip prevent carrier from retracting from tube, but noticed that carrier did not move prior to Ack. (i.e. system might have actually been under vacuum) Run proceeded normally after that and gave as expected results.