From seymour at snf.stanford.edu Wed Oct 6 10:51:22 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 6 Oct 2010 10:51:22 -0700 Subject: Shutdown teos2 SNF 2010-09-23 15:13:24: door interlock not working Message-ID: door working correctly but graphic display doesn't reflect that. tube base is good and ROR good. Tube running pump7. From seymour at snf.stanford.edu Wed Oct 6 10:52:56 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 6 Oct 2010 10:52:56 -0700 Subject: Problem teos2 SNF 2010-09-23 13:07:06: Not boating in after loading wafers Message-ID: computer thought door was already closed and turned pump on. Doior interlock working correctly now. From seymour at snf.stanford.edu Wed Oct 6 10:53:17 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 6 Oct 2010 10:53:17 -0700 Subject: Problem teos2 SNF 2010-10-06 10:53:16: needs test after repair Message-ID: From maurice at snf.stanford.edu Wed Oct 6 15:46:06 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 6 Oct 2010 15:46:06 -0700 Subject: Shutdown teos2 SNF 2010-10-06 15:46:05: not pumping Message-ID: From seymour at snf.stanford.edu Tue Oct 12 14:31:37 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 12 Oct 2010 14:31:37 -0700 Subject: Shutdown teos2 SNF 2010-10-06 15:46:05: not pumping Message-ID: replaced burnt orings and did pressure check. Base was good at 22 mT ROR was 7 mT/min. Needs test after repair. From seymour at snf.stanford.edu Tue Oct 12 14:33:55 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 12 Oct 2010 14:33:55 -0700 Subject: Problem teos2 SNF 2010-10-06 10:53:16: needs test after repair Message-ID: this is an old message I will put in a new one. From seymour at snf.stanford.edu Tue Oct 12 14:34:41 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 12 Oct 2010 14:34:41 -0700 Subject: Problem teos2 SNF 2010-10-12 14:34:41: needs testing after repair Message-ID: all new orings installed and system base and ROR are good From maurice at snf.stanford.edu Wed Oct 13 14:36:11 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 13 Oct 2010 14:36:11 -0700 Subject: Problem teos2 SNF 2010-10-12 14:34:41: needs testing after repair Message-ID: Ran TEOS2STD 00:15:00 Expected 920ang Actual 918 (woolam) From narii at snf.stanford.edu Sun Oct 24 21:16:05 2010 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Sun, 24 Oct 2010 21:16:05 -0700 Subject: Problem teos2 SNF 2010-10-24 21:16:04: MFS alarm Message-ID: Got MFS alarm during deposition step of TEOS2STD recipe From seymour at snf.stanford.edu Mon Oct 25 09:08:36 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 25 Oct 2010 09:08:36 -0700 Subject: Problem teos2 SNF 2010-10-25 09:08:36: found tube vented Message-ID: pump7 loaded but not running. From seymour at snf.stanford.edu Mon Oct 25 09:08:50 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 25 Oct 2010 09:08:50 -0700 Subject: Comment teos2 SNF 2010-10-25 09:08:49: Message-ID: From seymour at snf.stanford.edu Mon Oct 25 09:09:08 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 25 Oct 2010 09:09:08 -0700 Subject: Comment teos2 SNF 2010-10-25 09:08:49: Message-ID: From maurice at snf.stanford.edu Wed Oct 27 14:12:40 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 27 Oct 2010 14:12:40 -0700 Subject: Problem teos2 SNF 2010-10-25 09:08:36: found tube vented Message-ID: pump program now loaded From maurice at snf.stanford.edu Wed Oct 27 14:18:29 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 27 Oct 2010 14:18:29 -0700 Subject: Problem teos2 SNF 2010-10-24 21:16:04: MFS alarm Message-ID: Ran recipe and got no errors. - If error happens again, user should report it on coral and try (if they can) to report what the alarm is for.