From seymour at snf.stanford.edu Fri Sep 10 07:38:23 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 10 Sep 2010 07:38:23 -0700 Subject: Shutdown teos2 SNF 2010-09-10 07:38:22: burnbox liner broken Message-ID: From tberg at snf.stanford.edu Fri Sep 10 14:36:31 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 10 Sep 2010 14:36:31 -0700 Subject: Comment teos2 SNF 2010-09-10 14:36:31: Liner should be here monday Message-ID: Liner should be here on Monday so hopefully burn box will be up then From seymour at snf.stanford.edu Fri Sep 10 15:16:44 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 10 Sep 2010 15:16:44 -0700 Subject: Shutdown teos2 SNF 2010-09-10 07:38:22: burnbox liner broken Message-ID: liner installed and burnbox up to temp. tube running pump7 From maurice at snf.stanford.edu Mon Sep 13 15:54:57 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 13 Sep 2010 15:54:57 -0700 Subject: Problem teos2 SNF 2010-09-13 15:54:56: pressure rising during dep Message-ID: Pressure stayed at 1200mtorr setpoint for first 15 min then slowly began to climb. 15:00 1200mtorr 33:00 1403 41:00 1567 55:00 1703 From seymour at snf.stanford.edu Tue Sep 14 09:22:44 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 14 Sep 2010 09:22:44 -0700 Subject: Comment teos2 SNF 2010-09-14 09:22:43: cleaned tube neck Message-ID: baked out trap. From lindaw at snf.stanford.edu Tue Sep 14 12:42:19 2010 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Tue, 14 Sep 2010 12:42:19 -0700 Subject: Problem teos2 SNF 2010-09-14 12:42:18: MFS alarm step 70 no TEOS flow Message-ID: From tberg at snf.stanford.edu Wed Sep 15 05:58:42 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 15 Sep 2010 05:58:42 -0700 Subject: Problem teos2 SNF 2010-09-14 12:42:18: MFS alarm step 70 no TEOS flow Message-ID: flow was normal when i checked it From tberg at snf.stanford.edu Wed Sep 15 05:59:01 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 15 Sep 2010 05:59:01 -0700 Subject: Comment teos2 SNF 2010-09-10 14:36:31: Liner should be here monday Message-ID: replaced liner From tberg at snf.stanford.edu Wed Sep 15 05:59:13 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 15 Sep 2010 05:59:13 -0700 Subject: Comment teos2 SNF 2010-07-28 13:44:36: Pumped out System again Message-ID: noted From maurice at snf.stanford.edu Wed Sep 15 15:49:17 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 15 Sep 2010 15:49:17 -0700 Subject: Shutdown teos2 SNF 2010-09-15 15:49:16: pressure issue Message-ID: Trap will be checked tomorrow morning From tberg at snf.stanford.edu Thu Sep 16 10:30:47 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 16 Sep 2010 10:30:47 -0700 Subject: Shutdown teos2 SNF 2010-09-15 15:49:16: pressure issue Message-ID: Cleaned trap pressure with 500 sccm N2 is now 345mTbase is 22mT leak rate is about 32mT/ min From maurice at snf.stanford.edu Thu Sep 16 14:56:42 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 16 Sep 2010 14:56:42 -0700 Subject: Shutdown teos2 SNF 2010-09-16 14:56:42: Hi base pressure Message-ID: System failing leakcheck From seymour at snf.stanford.edu Fri Sep 17 15:25:08 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 17 Sep 2010 15:25:08 -0700 Subject: Shutdown teos2 SNF 2010-09-16 14:56:42: Hi base pressure Message-ID: replaced all orings From seymour at snf.stanford.edu Fri Sep 17 15:25:38 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 17 Sep 2010 15:25:38 -0700 Subject: Comment teos2 SNF 2010-09-17 15:25:37: needs test after repair Message-ID: From wslee at snf.stanford.edu Fri Sep 17 18:24:31 2010 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Fri, 17 Sep 2010 18:24:31 -0700 Subject: Problem teos2 SNF 2010-09-17 18:24:30: Failed leak check twice... Message-ID: Base pressure was about 39 for the first attempt and it failed leak check within 15s. The second time the base pressure got down to 30.7 but failed after 40s (it was so close!). Hopefully after a weekend of pumping down it will work. From seymour at snf.stanford.edu Mon Sep 20 07:44:26 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 20 Sep 2010 07:44:26 -0700 Subject: Comment teos2 SNF 2010-09-20 07:44:26: did a leak check on monday morning Message-ID: the base pressure was 16 mT and the ROR was 13 mT/min From seymour at snf.stanford.edu Tue Sep 21 15:14:57 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 21 Sep 2010 15:14:57 -0700 Subject: Comment teos2 SNF 2010-09-21 15:14:56: replaced teos cannister Message-ID: The cannister is heating up to 75 degs at this ttime. When it reaches 75 the tube is ok to run. From maurice at snf.stanford.edu Wed Sep 22 13:29:57 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 22 Sep 2010 13:29:57 -0700 Subject: Problem teos2 SNF 2010-09-17 18:24:30: Failed leak check twice... Message-ID: Both wslee and I have run system now without leakcheck problems From maurice at snf.stanford.edu Wed Sep 22 13:30:42 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 22 Sep 2010 13:30:42 -0700 Subject: Problem teos2 SNF 2010-09-13 15:54:56: pressure rising during dep Message-ID: Both wslee and I have run system now without pressure problems From maurice at snf.stanford.edu Wed Sep 22 13:31:14 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 22 Sep 2010 13:31:14 -0700 Subject: Comment teos2 SNF 2010-09-14 09:22:43: cleaned tube neck Message-ID: Both wslee and I have run system now without pressure problems From maurice at snf.stanford.edu Wed Sep 22 13:31:49 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 22 Sep 2010 13:31:49 -0700 Subject: Comment teos2 SNF 2010-09-17 15:25:37: needs test after repair Message-ID: Both wslee and I have run system now without problems and got desired thickness From maurice at snf.stanford.edu Wed Sep 22 13:32:04 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 22 Sep 2010 13:32:04 -0700 Subject: Comment teos2 SNF 2010-09-20 07:44:26: did a leak check on monday morning Message-ID: looks good! From maurice at snf.stanford.edu Wed Sep 22 13:32:40 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 22 Sep 2010 13:32:40 -0700 Subject: Comment teos2 SNF 2010-09-21 15:14:56: replaced teos cannister Message-ID: system at temp From wslee at snf.stanford.edu Thu Sep 23 13:07:06 2010 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Thu, 23 Sep 2010 13:07:06 -0700 Subject: Problem teos2 SNF 2010-09-23 13:07:06: Not boating in after loading wafers Message-ID: For teos2std recipe, the recipe boats out but does not boat in after pressing the alarm ack button. It goes straight to step 15 and begins pumping down the chamber while the boat is still out. From seymour at snf.stanford.edu Thu Sep 23 15:13:24 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 23 Sep 2010 15:13:24 -0700 Subject: Shutdown teos2 SNF 2010-09-23 15:13:24: door interlock not working Message-ID: