Problem teos2 SNF 2010-09-13 15:54:56: pressure rising during dep

maurice at snf.stanford.edu maurice at snf.stanford.edu
Mon Sep 13 15:54:57 PDT 2010


Pressure stayed at 1200mtorr setpoint for first 15 min then slowly began to climb.
15:00   1200mtorr
33:00   1403
41:00   1567
55:00  1703




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