Problem teos2 SNF 2010-09-13 15:54:56: pressure rising during dep
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Mon Sep 13 15:54:57 PDT 2010
Pressure stayed at 1200mtorr setpoint for first 15 min then slowly began to climb.
15:00 1200mtorr
33:00 1403
41:00 1567
55:00 1703
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