Problem teos2 SNF 2010-09-23 13:07:06: Not boating in after loading wafers

wslee at snf.stanford.edu wslee at snf.stanford.edu
Thu Sep 23 13:07:06 PDT 2010


For teos2std recipe, the recipe boats out but does not boat in after pressing the alarm ack button.  It goes straight to step 15 and begins pumping down the chamber while the boat is still out.




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