From maurice at snf.stanford.edu Fri Apr 1 14:59:04 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 1 Apr 2011 14:59:04 -0700 Subject: Problem teos2 SNF 2011-03-31 13:16:53: needs test aftre repair Message-ID: Ran teos2std 00:16:00 expected ~900 Ang actual 850 c,t,b,l,r 850,887,878,874,884 From seymour at snf.stanford.edu Fri Apr 1 15:21:15 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 1 Apr 2011 15:21:15 -0700 Subject: Shutdown teos2 SNF 2011-04-01 15:21:14: tube will not pump down Message-ID: From seymour at snf.stanford.edu Mon Apr 4 11:02:53 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 4 Apr 2011 11:02:53 -0700 Subject: Shutdown teos2 SNF 2011-04-01 15:21:14: tube will not pump down Message-ID: adjusted loader to seal the door and allow tube to be opened when vented. Basr pressure was 24 ror was 10 mT/min From srikantv at snf.stanford.edu Mon Apr 18 01:35:08 2011 From: srikantv at snf.stanford.edu (srikantv at snf.stanford.edu) Date: Mon, 18 Apr 2011 01:35:08 -0700 Subject: Problem teos2 SNF 2011-04-18 01:35:07: fails leakcheck 2 out of 3 times Message-ID: From srikantv at snf.stanford.edu Mon Apr 18 03:27:28 2011 From: srikantv at snf.stanford.edu (srikantv at snf.stanford.edu) Date: Mon, 18 Apr 2011 03:27:28 -0700 Subject: Shutdown teos2 SNF 2011-04-18 03:27:27: Pressure too high during dep and faulted Message-ID: pressure went about 1970 during deposition step 70 and faulted From tberg at snf.stanford.edu Mon Apr 18 09:45:56 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 18 Apr 2011 09:45:56 -0700 Subject: Shutdown teos2 SNF 2011-04-18 03:27:27: Pressure too high during dep and faulted Message-ID: Cleaned End of tube. Base pressure is good, leak rate is good. Needs test From tberg at snf.stanford.edu Mon Apr 18 09:47:08 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 18 Apr 2011 09:47:08 -0700 Subject: Comment teos2 SNF 2011-03-03 13:49:21: Pump is bad Message-ID: pump is back- looks good From tberg at snf.stanford.edu Mon Apr 18 09:47:26 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 18 Apr 2011 09:47:26 -0700 Subject: Comment teos2 SNF 2011-03-31 05:59:54: pump is back Message-ID: pump is back looks good From tberg at snf.stanford.edu Mon Apr 18 09:48:41 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 18 Apr 2011 09:48:41 -0700 Subject: Comment teos2 SNF 2011-04-18 09:48:41: Cleaned End of tube. Base pressure is good, leak rate is good. Needs test Message-ID: From maurice at snf.stanford.edu Mon Apr 18 14:20:59 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 18 Apr 2011 14:20:59 -0700 Subject: Comment teos2 SNF 2011-04-18 14:20:57: running 1hr test Message-ID: From maurice at snf.stanford.edu Mon Apr 18 16:03:26 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 18 Apr 2011 16:03:26 -0700 Subject: Comment teos2 SNF 2011-04-18 14:20:57: running 1hr test Message-ID: Ran Teos2std 01:00:00 pressure rose to 1749 mtorr in one hour set point is 1200 mtorr system will abort deposition step at 1900mtorr From grahamab at snf.stanford.edu Mon Apr 18 16:25:23 2011 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Mon, 18 Apr 2011 16:25:23 -0700 Subject: Problem teos2 SNF 2011-04-18 16:25:23: not pumping down Message-ID: was alarming for not pumping down. restarted and will check again in a while. From srikantv at snf.stanford.edu Tue Apr 19 00:06:51 2011 From: srikantv at snf.stanford.edu (srikantv at snf.stanford.edu) Date: Tue, 19 Apr 2011 00:06:51 -0700 Subject: Shutdown teos2 SNF 2011-04-19 00:06:51: deposition aborted due to pressure failure Message-ID: I tried to run TEOS2STD twice. Both times the pressure increased from 1200 mtorr to 1900+ mtorr within 10 minutes of deposition starting (step 70) and then aborted From seymour at snf.stanford.edu Tue Apr 19 09:16:50 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 19 Apr 2011 09:16:50 -0700 Subject: Shutdown teos2 SNF 2011-04-19 00:06:51: deposition aborted due to pressure failure Message-ID: ted removed and cleaned pump line trap. Reinstalled and checked base pressure and ROR both were good. Level alarm on TEOS source so I changed source and it is coming up to temp. From seymour at snf.stanford.edu Tue Apr 19 09:17:50 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 19 Apr 2011 09:17:50 -0700 Subject: Problem teos2 SNF 2011-04-18 16:25:23: not pumping down Message-ID: system pumping with no problems. good base and ROR. From seymour at snf.stanford.edu Tue Apr 19 09:19:05 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 19 Apr 2011 09:19:05 -0700 Subject: Problem teos2 SNF 2011-04-18 01:35:07: fails leakcheck 2 out of 3 times Message-ID: tube pump to a base of 16 mT and ROR was 18 mT/min From srikantv at snf.stanford.edu Thu Apr 21 00:24:53 2011 From: srikantv at snf.stanford.edu (srikantv at snf.stanford.edu) Date: Thu, 21 Apr 2011 00:24:53 -0700 Subject: Problem teos2 SNF 2011-04-21 00:24:52: leak check fails 1st time Message-ID: leak check always fails the first time at step 45 of TEOS2STD I have to run the program again without boating out to pass leak check It maintains deposition pressure of 1200mT without problem. From srikantv at snf.stanford.edu Tue Apr 26 03:43:58 2011 From: srikantv at snf.stanford.edu (srikantv at snf.stanford.edu) Date: Tue, 26 Apr 2011 03:43:58 -0700 Subject: Shutdown teos2 SNF 2011-04-26 03:43:58: fails leak check Message-ID: 1) takes multiple attempts to get tube to pump down 2) fails leak check as pressure rapidly rises from 27mT to above 60mT From seymour at snf.stanford.edu Wed Apr 27 08:47:46 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 27 Apr 2011 08:47:46 -0700 Subject: Problem teos2 SNF 2011-04-21 00:24:52: leak check fails 1st time Message-ID: passed leak check base was 27 mT, ror was 19 mT/min From seymour at snf.stanford.edu Wed Apr 27 08:50:50 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 27 Apr 2011 08:50:50 -0700 Subject: Shutdown teos2 SNF 2011-04-26 03:43:58: fails leak check Message-ID: replaced burnt front orings and rear orings. passed leak check, base 27 and ror of 19 mT/min. Heating up to operating temp thewn ready for testing. From seymour at snf.stanford.edu Wed Apr 27 08:51:18 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 27 Apr 2011 08:51:18 -0700 Subject: Problem teos2 SNF 2011-04-27 08:51:17: needs test after repair Message-ID: From maurice at snf.stanford.edu Wed Apr 27 14:55:59 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 27 Apr 2011 14:55:59 -0700 Subject: Problem teos2 SNF 2011-04-27 08:51:17: needs test after repair Message-ID: ran teos2std 00:16:00 - expected ~900Ang actual 946ang - passed leak check first time - process pressure stable at 1202 mtorr