Comment teos2 SNF 2011-04-18 14:20:57: running 1hr test

maurice at snf.stanford.edu maurice at snf.stanford.edu
Mon Apr 18 16:03:26 PDT 2011


Ran Teos2std  01:00:00
pressure rose to 1749 mtorr in one hour
set point is 1200 mtorr
system will abort deposition step at 1900mtorr




More information about the teos2-pcs mailing list