Comment teos2 SNF 2011-04-18 14:20:57: running 1hr test
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Mon Apr 18 16:03:26 PDT 2011
Ran Teos2std 01:00:00
pressure rose to 1749 mtorr in one hour
set point is 1200 mtorr
system will abort deposition step at 1900mtorr
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