Shutdown teos2 SNF 2011-04-19 00:06:51: deposition aborted due to pressure failure

srikantv at snf.stanford.edu srikantv at snf.stanford.edu
Tue Apr 19 00:06:51 PDT 2011


I tried to run TEOS2STD twice.
Both times the pressure increased from 1200 mtorr to 1900+ mtorr within 10 minutes of deposition starting (step 70) and then aborted




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