Shutdown teos2 SNF 2011-04-19 00:06:51: deposition aborted due to pressure failure

srikantv at snf.stanford.edu srikantv at snf.stanford.edu
Tue Apr 19 00:06:51 PDT 2011

Previous message: Problem teos2 SNF 2011-04-18 16:25:23: not pumping down
Next message: Shutdown teos2 SNF 2011-04-19 00:06:51: deposition aborted due to pressure failure
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

I tried to run TEOS2STD twice.
Both times the pressure increased from 1200 mtorr to 1900+ mtorr within 10 minutes of deposition starting (step 70) and then aborted

Previous message: Problem teos2 SNF 2011-04-18 16:25:23: not pumping down
Next message: Shutdown teos2 SNF 2011-04-19 00:06:51: deposition aborted due to pressure failure
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the teos2-pcs mailing list