Shutdown teos2 SNF 2011-04-19 00:06:51: deposition aborted due to pressure failure

seymour at snf.stanford.edu seymour at snf.stanford.edu
Tue Apr 19 09:16:50 PDT 2011


ted removed and cleaned pump line trap. Reinstalled and checked base pressure and ROR both were good. Level alarm on TEOS source so I changed source and it is coming up to temp.




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