Problem teos2 SNF 2011-04-18 16:25:23: not pumping down
seymour at snf.stanford.edu
seymour at snf.stanford.edu
Tue Apr 19 09:17:50 PDT 2011
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Problem teos2 SNF 2011-04-18 16:25:23: not pumping down
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Shutdown teos2 SNF 2011-04-19 00:06:51: deposition aborted due to pressure failure
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system pumping with no problems. good base and ROR.
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Problem teos2 SNF 2011-04-18 16:25:23: not pumping down
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Shutdown teos2 SNF 2011-04-19 00:06:51: deposition aborted due to pressure failure
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