Problem teos2 SNF 2011-04-21 00:24:52: leak check fails 1st time

srikantv at snf.stanford.edu srikantv at snf.stanford.edu
Thu Apr 21 00:24:53 PDT 2011


leak check always fails the first time at step 45 of TEOS2STD
I have to run the program again without boating out to pass leak check
It maintains deposition pressure of 1200mT without problem.




More information about the teos2-pcs mailing list