From seymour at snf.stanford.edu Fri Dec 2 10:00:30 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 2 Dec 2011 10:00:30 -0800 Subject: Shutdown teos2 SNF 2011-11-21 19:18:14: pressure sensor is dead Message-ID: replaced tube orings and gate vlave bellows From seymour at snf.stanford.edu Fri Dec 2 10:01:47 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 2 Dec 2011 10:01:47 -0800 Subject: Shutdown teos2 SNF 2011-11-22 13:37:05: roots blower vibrating and strange sounds Message-ID: pump sent out for evaluation. when returned I replaced tube orings and gate valve bellows. Passed hot and cold leak check needs tesrting From seymour at snf.stanford.edu Fri Dec 2 10:02:04 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 2 Dec 2011 10:02:04 -0800 Subject: Problem teos2 SNF 2011-12-02 10:02:04: needs test after repair Message-ID: From seymour at snf.stanford.edu Fri Dec 2 11:59:42 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 2 Dec 2011 11:59:42 -0800 Subject: Comment teos2 SNF 2011-12-02 11:59:41: I looked at the door seal problem Message-ID: I tightened set screw on loader drive pully. opened and closed door. I did push the loader against the tube when the slow pump turned on and tube pumped down. From eldwin at snf.stanford.edu Fri Dec 2 12:01:06 2011 From: eldwin at snf.stanford.edu (eldwin at snf.stanford.edu) Date: Fri, 2 Dec 2011 12:01:06 -0800 Subject: Problem teos2 SNF 2011-12-02 12:01:05: MFS alarm Message-ID: MFS alarms at step 30, unable to run process From maurice at snf.stanford.edu Fri Dec 2 16:16:15 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 2 Dec 2011 16:16:15 -0800 Subject: Problem teos2 SNF 2011-12-02 12:01:05: MFS alarm Message-ID: >From Ray: I tightened set screw on loader drive pully. opened and closed door. I did push the loader against the tube when the slow pump turned on and tube pumped down. From wangss at snf.stanford.edu Sun Dec 4 08:16:24 2011 From: wangss at snf.stanford.edu (wangss at snf.stanford.edu) Date: Sun, 4 Dec 2011 08:16:24 -0800 Subject: Problem teos2 SNF 2011-12-04 08:16:23: low teos level Message-ID: need to replace. In addition, the teos flow fluctuate during process and it won't stablize. From seymour at snf.stanford.edu Mon Dec 5 07:17:45 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 5 Dec 2011 07:17:45 -0800 Subject: Comment teos2 SNF 2011-12-05 07:17:44: changing TEOS source Message-ID: From seymour at snf.stanford.edu Mon Dec 5 11:14:57 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 5 Dec 2011 11:14:57 -0800 Subject: Problem teos2 SNF 2011-12-04 08:16:23: low teos level Message-ID: TEOS source changed. The temp came up to 75 degs. I flowed TEOS at 70 sccm (69-71 sccm)with no flow errors. tube is ready for a test. From tberg at snf.stanford.edu Mon Dec 5 14:21:50 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 5 Dec 2011 14:21:50 -0800 Subject: Comment teos2 SNF 2011-12-05 14:21:50: TEOS needs a test Message-ID: TEOS source changed. The temp came up to 75 degs. I flowed TEOS at 70 sccm (69-71 sccm)with no flow errors. tube is ready for a test. From maurice at snf.stanford.edu Thu Dec 8 12:02:21 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 8 Dec 2011 12:02:21 -0800 Subject: Problem teos2 SNF 2011-12-02 10:02:04: needs test after repair Message-ID: Andrew reports: 5400A (1 hr dep) with 90A standard deviation. best I've ever seen From maurice at snf.stanford.edu Thu Dec 8 12:02:27 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 8 Dec 2011 12:02:27 -0800 Subject: Comment teos2 SNF 2011-12-05 14:21:50: TEOS needs a test Message-ID: Andrew reports: 5400A (1 hr dep) with 90A standard deviation. best I've ever seen From maurice at snf.stanford.edu Thu Dec 8 12:02:37 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 8 Dec 2011 12:02:37 -0800 Subject: Comment teos2 SNF 2011-12-05 07:17:44: changing TEOS source Message-ID: complete From maurice at snf.stanford.edu Thu Dec 8 12:03:02 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 8 Dec 2011 12:03:02 -0800 Subject: Comment teos2 SNF 2011-09-28 20:15:20: Deposition uniformity Message-ID: logged From maurice at snf.stanford.edu Thu Dec 8 12:03:11 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 8 Dec 2011 12:03:11 -0800 Subject: Comment teos2 SNF 2011-07-07 09:52:41: replaced dummies Message-ID: logged From tberg at snf.stanford.edu Mon Dec 12 07:24:33 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 12 Dec 2011 07:24:33 -0800 Subject: Shutdown teos2 SNF 2011-12-12 07:24:32: renovation Message-ID: