From seymour at snf.stanford.edu Fri Jul 1 14:05:36 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 1 Jul 2011 14:05:36 -0700 Subject: Shutdown teos2 SNF 2011-06-30 10:30:14: not pumping down Message-ID: rebuilt loader and checked operation. good base and leak rate. From cfchiang at snf.stanford.edu Tue Jul 5 12:02:09 2011 From: cfchiang at snf.stanford.edu (cfchiang at snf.stanford.edu) Date: Tue, 5 Jul 2011 12:02:09 -0700 Subject: Shutdown teos2 SNF 2011-07-05 12:02:09: Can't boat out Message-ID: aborted PUMP7 and vented for 40+ minutes, still can't boat out manually From seymour at snf.stanford.edu Wed Jul 6 11:50:37 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 6 Jul 2011 11:50:37 -0700 Subject: Shutdown teos2 SNF 2011-07-05 12:02:09: Can't boat out Message-ID: cooled tube down and got door opened. did cold leak check and it was good. turned on element breaker. ready for a test. From maurice at snf.stanford.edu Thu Jul 7 09:52:41 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 7 Jul 2011 09:52:41 -0700 Subject: Comment teos2 SNF 2011-07-07 09:52:41: replaced dummies Message-ID: From maurice at snf.stanford.edu Thu Jul 7 14:23:05 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 7 Jul 2011 14:23:05 -0700 Subject: Problem teos2 SNF 2011-06-29 12:10:01: needs test after repair Message-ID: ran TEOS2STD m 00:16:00 expected~950 ang Actuallu 927 (center point) From maurice at snf.stanford.edu Thu Jul 7 14:28:28 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 7 Jul 2011 14:28:28 -0700 Subject: Problem teos2 SNF 2011-06-27 15:19:55: process pressure problems Message-ID: tube changed, exhaust line trap cleaned. good base and leak check. with 500 From grahamab at snf.stanford.edu Fri Jul 8 10:20:15 2011 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Fri, 8 Jul 2011 10:20:15 -0700 Subject: Shutdown teos2 SNF 2011-07-08 10:20:14: won't pump down Message-ID: tube was pumped down when I started, but won't pump down after loading wafers and starting recipe. boated out and retried with same result. running recipe teos2std. From seymour at snf.stanford.edu Fri Jul 8 11:32:43 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 8 Jul 2011 11:32:43 -0700 Subject: Shutdown teos2 SNF 2011-07-08 10:20:14: won't pump down Message-ID: found tube with pump7 loaded and alarming for N2LO. aborted tube checked N2LO MFC. Ran auto zero routine. opened and closed tube manually and started pump down. tube pumped down. Started pump7 after opening and closeing door and it pumped down ok. Running pump7 at this time. Door most likely was not sealed during previous run problems. If door was asked to open before fully vented it could have been at an slight angle to tube end. I will keep an eye on the tube. From seymour at snf.stanford.edu Fri Jul 8 11:34:31 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 8 Jul 2011 11:34:31 -0700 Subject: Comment teos2 SNF 2011-07-08 11:34:30: door may have had a closing problem Message-ID: pump and tube pressure good when door catches tube end. If you have a problem please contact me. From grahamab at snf.stanford.edu Fri Jul 8 17:02:04 2011 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Fri, 8 Jul 2011 17:02:04 -0700 Subject: Problem teos2 SNF 2011-07-08 17:02:03: tube did not boat out after vent step Message-ID: after 30min vent step, found tube had still not boated out but was clearly trying to. aborted recipe and tube would finally boat out after approximately 10 more minutes. From grahamab at snf.stanford.edu Fri Jul 8 17:33:16 2011 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Fri, 8 Jul 2011 17:33:16 -0700 Subject: Problem teos2 SNF 2011-07-08 17:33:15: wont' pass leak check on pump recipe Message-ID: tried twice; pushed lightly on the door during closing, still doesn't pass leak check step. pumped down well during second try, but failed leak check. i quit. From seymour at snf.stanford.edu Mon Jul 11 09:01:09 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 11 Jul 2011 09:01:09 -0700 Subject: Problem teos2 SNF 2011-07-08 17:02:03: tube did not boat out after vent step Message-ID: tube is pumping after door adjustment From seymour at snf.stanford.edu Mon Jul 11 09:05:55 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 11 Jul 2011 09:05:55 -0700 Subject: Problem teos2 SNF 2011-07-08 17:33:15: wont' pass leak check on pump recipe Message-ID: passes leak check. base was 18 mT with a ROR of 20 mT, with 500 sccm N2 flowing tube pressure was 334 mT. System needs a minium of 16 mins (N2LO at 500 and N2Backfil 2000) flow to vent From seymour at snf.stanford.edu Mon Jul 11 09:08:18 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 11 Jul 2011 09:08:18 -0700 Subject: Comment teos2 SNF 2011-07-11 09:08:18: tube pumping down Message-ID: adjusted door alignment and pumped tube down. Opened and closed tube 3 times and door sealed each time. Give the tube a min of 16 mins to vent before trying to open as this can pull the tube door out of alignment. From maurice at snf.stanford.edu Wed Jul 13 11:40:12 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 13 Jul 2011 11:40:12 -0700 Subject: Shutdown teos2 SNF 2011-07-13 11:40:11: kicking out of the pump program Message-ID: From seymour at snf.stanford.edu Thu Jul 14 14:42:46 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 14 Jul 2011 14:42:46 -0700 Subject: Shutdown teos2 SNF 2011-07-13 11:40:11: kicking out of the pump program Message-ID: I pushed in all connectors for MFC on rear of MFS460. Tube has been running pump7 for 24 hours with no N2LO errors. I vented tube and opened and closed tube in manual. Tube pump down to base and N2LO came on (running pump7 in auto).